JPS5264880A - Formation of patterns of thin mo films - Google Patents
Formation of patterns of thin mo filmsInfo
- Publication number
- JPS5264880A JPS5264880A JP14097375A JP14097375A JPS5264880A JP S5264880 A JPS5264880 A JP S5264880A JP 14097375 A JP14097375 A JP 14097375A JP 14097375 A JP14097375 A JP 14097375A JP S5264880 A JPS5264880 A JP S5264880A
- Authority
- JP
- Japan
- Prior art keywords
- thin
- patterns
- films
- formation
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To form fine patterns on a thin Mo film by forming resist patterns on the thin Mo film, immersing the substrate in an aqueous solution which oxides Mo to form the production of reaction on the part removed of Mo, then removing the production of reaction with an aqueous solution containing phosphoric acid or phosphoric acid groups.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14097375A JPS5264880A (en) | 1975-11-25 | 1975-11-25 | Formation of patterns of thin mo films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14097375A JPS5264880A (en) | 1975-11-25 | 1975-11-25 | Formation of patterns of thin mo films |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5264880A true JPS5264880A (en) | 1977-05-28 |
Family
ID=15281133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14097375A Pending JPS5264880A (en) | 1975-11-25 | 1975-11-25 | Formation of patterns of thin mo films |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5264880A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5482172A (en) * | 1977-12-14 | 1979-06-30 | Nippon Telegr & Teleph Corp <Ntt> | Pattern forming method for mo thin film using al mask |
-
1975
- 1975-11-25 JP JP14097375A patent/JPS5264880A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5482172A (en) * | 1977-12-14 | 1979-06-30 | Nippon Telegr & Teleph Corp <Ntt> | Pattern forming method for mo thin film using al mask |
JPS5640493B2 (en) * | 1977-12-14 | 1981-09-21 |
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