JPS5264880A - Formation of patterns of thin mo films - Google Patents

Formation of patterns of thin mo films

Info

Publication number
JPS5264880A
JPS5264880A JP14097375A JP14097375A JPS5264880A JP S5264880 A JPS5264880 A JP S5264880A JP 14097375 A JP14097375 A JP 14097375A JP 14097375 A JP14097375 A JP 14097375A JP S5264880 A JPS5264880 A JP S5264880A
Authority
JP
Japan
Prior art keywords
thin
patterns
films
formation
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14097375A
Other languages
Japanese (ja)
Inventor
Hideo Oikawa
Tsutomu Wada
Takao Amasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP14097375A priority Critical patent/JPS5264880A/en
Publication of JPS5264880A publication Critical patent/JPS5264880A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To form fine patterns on a thin Mo film by forming resist patterns on the thin Mo film, immersing the substrate in an aqueous solution which oxides Mo to form the production of reaction on the part removed of Mo, then removing the production of reaction with an aqueous solution containing phosphoric acid or phosphoric acid groups.
COPYRIGHT: (C)1977,JPO&Japio
JP14097375A 1975-11-25 1975-11-25 Formation of patterns of thin mo films Pending JPS5264880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14097375A JPS5264880A (en) 1975-11-25 1975-11-25 Formation of patterns of thin mo films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14097375A JPS5264880A (en) 1975-11-25 1975-11-25 Formation of patterns of thin mo films

Publications (1)

Publication Number Publication Date
JPS5264880A true JPS5264880A (en) 1977-05-28

Family

ID=15281133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14097375A Pending JPS5264880A (en) 1975-11-25 1975-11-25 Formation of patterns of thin mo films

Country Status (1)

Country Link
JP (1) JPS5264880A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5482172A (en) * 1977-12-14 1979-06-30 Nippon Telegr & Teleph Corp <Ntt> Pattern forming method for mo thin film using al mask

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5482172A (en) * 1977-12-14 1979-06-30 Nippon Telegr & Teleph Corp <Ntt> Pattern forming method for mo thin film using al mask
JPS5640493B2 (en) * 1977-12-14 1981-09-21

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