JPS5640493B2 - - Google Patents

Info

Publication number
JPS5640493B2
JPS5640493B2 JP14930877A JP14930877A JPS5640493B2 JP S5640493 B2 JPS5640493 B2 JP S5640493B2 JP 14930877 A JP14930877 A JP 14930877A JP 14930877 A JP14930877 A JP 14930877A JP S5640493 B2 JPS5640493 B2 JP S5640493B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14930877A
Other languages
Japanese (ja)
Other versions
JPS5482172A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14930877A priority Critical patent/JPS5482172A/en
Publication of JPS5482172A publication Critical patent/JPS5482172A/en
Publication of JPS5640493B2 publication Critical patent/JPS5640493B2/ja
Granted legal-status Critical Current

Links

JP14930877A 1977-12-14 1977-12-14 Pattern forming method for mo thin film using al mask Granted JPS5482172A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14930877A JPS5482172A (en) 1977-12-14 1977-12-14 Pattern forming method for mo thin film using al mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14930877A JPS5482172A (en) 1977-12-14 1977-12-14 Pattern forming method for mo thin film using al mask

Publications (2)

Publication Number Publication Date
JPS5482172A JPS5482172A (en) 1979-06-30
JPS5640493B2 true JPS5640493B2 (en) 1981-09-21

Family

ID=15472283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14930877A Granted JPS5482172A (en) 1977-12-14 1977-12-14 Pattern forming method for mo thin film using al mask

Country Status (1)

Country Link
JP (1) JPS5482172A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264880A (en) * 1975-11-25 1977-05-28 Nippon Telegr & Teleph Corp <Ntt> Formation of patterns of thin mo films

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264880A (en) * 1975-11-25 1977-05-28 Nippon Telegr & Teleph Corp <Ntt> Formation of patterns of thin mo films

Also Published As

Publication number Publication date
JPS5482172A (en) 1979-06-30

Similar Documents

Publication Publication Date Title
DE2825810C2 (en)
DE2808125C2 (en)
DE2821433C2 (en)
FR2377294B1 (en)
FR2377510B3 (en)
FR2376856B1 (en)
DE2821986B2 (en)
JPS5640493B2 (en)
BG25840A1 (en)
BG25829A1 (en)
BE865722A (en)
CH614878A5 (en)
BG26021A1 (en)
BG25860A1 (en)
BG25855A1 (en)
BG25853A1 (en)
BG25852A1 (en)
BG25851A1 (en)
BG25850A1 (en)
BG25848A1 (en)
BG25847A1 (en)
BG25845A1 (en)
BG25844A1 (en)
BG25841A1 (en)
BG25828A1 (en)