JPS5640493B2 - - Google Patents
Info
- Publication number
- JPS5640493B2 JPS5640493B2 JP14930877A JP14930877A JPS5640493B2 JP S5640493 B2 JPS5640493 B2 JP S5640493B2 JP 14930877 A JP14930877 A JP 14930877A JP 14930877 A JP14930877 A JP 14930877A JP S5640493 B2 JPS5640493 B2 JP S5640493B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14930877A JPS5482172A (en) | 1977-12-14 | 1977-12-14 | Pattern forming method for mo thin film using al mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14930877A JPS5482172A (en) | 1977-12-14 | 1977-12-14 | Pattern forming method for mo thin film using al mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5482172A JPS5482172A (en) | 1979-06-30 |
JPS5640493B2 true JPS5640493B2 (en) | 1981-09-21 |
Family
ID=15472283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14930877A Granted JPS5482172A (en) | 1977-12-14 | 1977-12-14 | Pattern forming method for mo thin film using al mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5482172A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5264880A (en) * | 1975-11-25 | 1977-05-28 | Nippon Telegr & Teleph Corp <Ntt> | Formation of patterns of thin mo films |
-
1977
- 1977-12-14 JP JP14930877A patent/JPS5482172A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5264880A (en) * | 1975-11-25 | 1977-05-28 | Nippon Telegr & Teleph Corp <Ntt> | Formation of patterns of thin mo films |
Also Published As
Publication number | Publication date |
---|---|
JPS5482172A (en) | 1979-06-30 |