JPS5264873A - Production of boron phosphide semiconductor device - Google Patents

Production of boron phosphide semiconductor device

Info

Publication number
JPS5264873A
JPS5264873A JP14131175A JP14131175A JPS5264873A JP S5264873 A JPS5264873 A JP S5264873A JP 14131175 A JP14131175 A JP 14131175A JP 14131175 A JP14131175 A JP 14131175A JP S5264873 A JPS5264873 A JP S5264873A
Authority
JP
Japan
Prior art keywords
boron phosphide
production
semiconductor device
phosphide semiconductor
gas containing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14131175A
Other languages
Japanese (ja)
Inventor
Katsuto Nagano
Kazuhiko Ihaya
Shozo Sasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP14131175A priority Critical patent/JPS5264873A/en
Publication of JPS5264873A publication Critical patent/JPS5264873A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Led Devices (AREA)
  • Light Receiving Elements (AREA)

Abstract

PURPOSE: To increase crystal purity by forming two layers by reactive gas containing halogenide after the growth by thermal decomposition of reactive gas containing hydride or organic metal compound at the time of vapor growing a boron phosphide semiconductor on a hetero substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP14131175A 1975-11-26 1975-11-26 Production of boron phosphide semiconductor device Pending JPS5264873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14131175A JPS5264873A (en) 1975-11-26 1975-11-26 Production of boron phosphide semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14131175A JPS5264873A (en) 1975-11-26 1975-11-26 Production of boron phosphide semiconductor device

Publications (1)

Publication Number Publication Date
JPS5264873A true JPS5264873A (en) 1977-05-28

Family

ID=15288933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14131175A Pending JPS5264873A (en) 1975-11-26 1975-11-26 Production of boron phosphide semiconductor device

Country Status (1)

Country Link
JP (1) JPS5264873A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493882A (en) * 1972-05-01 1974-01-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493882A (en) * 1972-05-01 1974-01-14

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