JPS5264873A - Production of boron phosphide semiconductor device - Google Patents
Production of boron phosphide semiconductor deviceInfo
- Publication number
- JPS5264873A JPS5264873A JP14131175A JP14131175A JPS5264873A JP S5264873 A JPS5264873 A JP S5264873A JP 14131175 A JP14131175 A JP 14131175A JP 14131175 A JP14131175 A JP 14131175A JP S5264873 A JPS5264873 A JP S5264873A
- Authority
- JP
- Japan
- Prior art keywords
- boron phosphide
- production
- semiconductor device
- phosphide semiconductor
- gas containing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Led Devices (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To increase crystal purity by forming two layers by reactive gas containing halogenide after the growth by thermal decomposition of reactive gas containing hydride or organic metal compound at the time of vapor growing a boron phosphide semiconductor on a hetero substrate.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14131175A JPS5264873A (en) | 1975-11-26 | 1975-11-26 | Production of boron phosphide semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14131175A JPS5264873A (en) | 1975-11-26 | 1975-11-26 | Production of boron phosphide semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5264873A true JPS5264873A (en) | 1977-05-28 |
Family
ID=15288933
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14131175A Pending JPS5264873A (en) | 1975-11-26 | 1975-11-26 | Production of boron phosphide semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5264873A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493882A (en) * | 1972-05-01 | 1974-01-14 |
-
1975
- 1975-11-26 JP JP14131175A patent/JPS5264873A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493882A (en) * | 1972-05-01 | 1974-01-14 |
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