JPS5261980A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5261980A JPS5261980A JP13845775A JP13845775A JPS5261980A JP S5261980 A JPS5261980 A JP S5261980A JP 13845775 A JP13845775 A JP 13845775A JP 13845775 A JP13845775 A JP 13845775A JP S5261980 A JPS5261980 A JP S5261980A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- forming
- wiring layer
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13845775A JPS5261980A (en) | 1975-11-18 | 1975-11-18 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13845775A JPS5261980A (en) | 1975-11-18 | 1975-11-18 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5261980A true JPS5261980A (en) | 1977-05-21 |
Family
ID=15222453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13845775A Pending JPS5261980A (en) | 1975-11-18 | 1975-11-18 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5261980A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5796549A (en) * | 1980-12-08 | 1982-06-15 | Seiko Epson Corp | Manufacture of semiconductor device |
JPS57102051A (en) * | 1980-12-17 | 1982-06-24 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5969950A (ja) * | 1982-10-15 | 1984-04-20 | Nec Corp | 多層配線形成方法 |
JPS60210851A (ja) * | 1984-04-05 | 1985-10-23 | Toshiba Corp | 半導体装置とその製造方法 |
US4985373A (en) * | 1982-04-23 | 1991-01-15 | At&T Bell Laboratories | Multiple insulating layer for two-level interconnected metallization in semiconductor integrated circuit structures |
-
1975
- 1975-11-18 JP JP13845775A patent/JPS5261980A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5796549A (en) * | 1980-12-08 | 1982-06-15 | Seiko Epson Corp | Manufacture of semiconductor device |
JPS57102051A (en) * | 1980-12-17 | 1982-06-24 | Fujitsu Ltd | Manufacture of semiconductor device |
US4985373A (en) * | 1982-04-23 | 1991-01-15 | At&T Bell Laboratories | Multiple insulating layer for two-level interconnected metallization in semiconductor integrated circuit structures |
JPS5969950A (ja) * | 1982-10-15 | 1984-04-20 | Nec Corp | 多層配線形成方法 |
JPS60210851A (ja) * | 1984-04-05 | 1985-10-23 | Toshiba Corp | 半導体装置とその製造方法 |
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