JPS525268A - Rotary coating device - Google Patents
Rotary coating deviceInfo
- Publication number
- JPS525268A JPS525268A JP8088675A JP8088675A JPS525268A JP S525268 A JPS525268 A JP S525268A JP 8088675 A JP8088675 A JP 8088675A JP 8088675 A JP8088675 A JP 8088675A JP S525268 A JPS525268 A JP S525268A
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- rotary coating
- rotary
- adhering
- wafer surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8088675A JPS525268A (en) | 1975-07-02 | 1975-07-02 | Rotary coating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8088675A JPS525268A (en) | 1975-07-02 | 1975-07-02 | Rotary coating device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS525268A true JPS525268A (en) | 1977-01-14 |
JPS5337701B2 JPS5337701B2 (ja) | 1978-10-11 |
Family
ID=13730816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8088675A Granted JPS525268A (en) | 1975-07-02 | 1975-07-02 | Rotary coating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS525268A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4393807A (en) * | 1979-09-19 | 1983-07-19 | Fujitsu Limited | Spinner |
JPS6279578U (ja) * | 1985-11-05 | 1987-05-21 | ||
US5395649A (en) * | 1992-02-04 | 1995-03-07 | Sony Corporation | Spin coating apparatus for film formation over substrate |
-
1975
- 1975-07-02 JP JP8088675A patent/JPS525268A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4393807A (en) * | 1979-09-19 | 1983-07-19 | Fujitsu Limited | Spinner |
JPS6279578U (ja) * | 1985-11-05 | 1987-05-21 | ||
US5395649A (en) * | 1992-02-04 | 1995-03-07 | Sony Corporation | Spin coating apparatus for film formation over substrate |
Also Published As
Publication number | Publication date |
---|---|
JPS5337701B2 (ja) | 1978-10-11 |
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