JPS5337701B2 - - Google Patents
Info
- Publication number
- JPS5337701B2 JPS5337701B2 JP8088675A JP8088675A JPS5337701B2 JP S5337701 B2 JPS5337701 B2 JP S5337701B2 JP 8088675 A JP8088675 A JP 8088675A JP 8088675 A JP8088675 A JP 8088675A JP S5337701 B2 JPS5337701 B2 JP S5337701B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8088675A JPS525268A (en) | 1975-07-02 | 1975-07-02 | Rotary coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8088675A JPS525268A (en) | 1975-07-02 | 1975-07-02 | Rotary coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS525268A JPS525268A (en) | 1977-01-14 |
| JPS5337701B2 true JPS5337701B2 (ja) | 1978-10-11 |
Family
ID=13730816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8088675A Granted JPS525268A (en) | 1975-07-02 | 1975-07-02 | Rotary coating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS525268A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5927229B2 (ja) * | 1979-09-19 | 1984-07-04 | 富士通株式会社 | スピンナ− |
| JPS6279578U (ja) * | 1985-11-05 | 1987-05-21 | ||
| US5395649A (en) * | 1992-02-04 | 1995-03-07 | Sony Corporation | Spin coating apparatus for film formation over substrate |
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1975
- 1975-07-02 JP JP8088675A patent/JPS525268A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS525268A (en) | 1977-01-14 |