JPS5245284A - Manufcturing method of field effect transistor of silicon gate type - Google Patents

Manufcturing method of field effect transistor of silicon gate type

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Publication number
JPS5245284A
JPS5245284A JP51084995A JP8499576A JPS5245284A JP S5245284 A JPS5245284 A JP S5245284A JP 51084995 A JP51084995 A JP 51084995A JP 8499576 A JP8499576 A JP 8499576A JP S5245284 A JPS5245284 A JP S5245284A
Authority
JP
Japan
Prior art keywords
field effect
effect transistor
gate type
silicon gate
manufcturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP51084995A
Other languages
Japanese (ja)
Other versions
JPS5227515B2 (en
Inventor
Norio Kobayashi
Taketoshi Kato
Teruo Yoneyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP51084995A priority Critical patent/JPS5245284A/en
Publication of JPS5245284A publication Critical patent/JPS5245284A/en
Publication of JPS5227515B2 publication Critical patent/JPS5227515B2/ja
Granted legal-status Critical Current

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Abstract

PURPOSE:To get good IGFET for use in the high frequency region by decreasing the floating capacity among the gate electrode and the source and the drain region.
JP51084995A 1976-07-19 1976-07-19 Manufcturing method of field effect transistor of silicon gate type Granted JPS5245284A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51084995A JPS5245284A (en) 1976-07-19 1976-07-19 Manufcturing method of field effect transistor of silicon gate type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51084995A JPS5245284A (en) 1976-07-19 1976-07-19 Manufcturing method of field effect transistor of silicon gate type

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2667171A Division JPS5147311B1 (en) 1971-04-26 1971-04-26

Publications (2)

Publication Number Publication Date
JPS5245284A true JPS5245284A (en) 1977-04-09
JPS5227515B2 JPS5227515B2 (en) 1977-07-20

Family

ID=13846206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51084995A Granted JPS5245284A (en) 1976-07-19 1976-07-19 Manufcturing method of field effect transistor of silicon gate type

Country Status (1)

Country Link
JP (1) JPS5245284A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5542152A (en) * 1978-09-19 1980-03-25 Taiyo Chuki Kk Mixing method and mixing device of mold sand and binder
JPS59130463A (en) * 1983-11-07 1984-07-27 Nec Kyushu Ltd Integrated circuit device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5542152A (en) * 1978-09-19 1980-03-25 Taiyo Chuki Kk Mixing method and mixing device of mold sand and binder
JPS59130463A (en) * 1983-11-07 1984-07-27 Nec Kyushu Ltd Integrated circuit device

Also Published As

Publication number Publication date
JPS5227515B2 (en) 1977-07-20

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