JPS5245285A - Manufacturing method of field effect transistor of silicon gate type - Google Patents
Manufacturing method of field effect transistor of silicon gate typeInfo
- Publication number
- JPS5245285A JPS5245285A JP8499676A JP8499676A JPS5245285A JP S5245285 A JPS5245285 A JP S5245285A JP 8499676 A JP8499676 A JP 8499676A JP 8499676 A JP8499676 A JP 8499676A JP S5245285 A JPS5245285 A JP S5245285A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- field effect
- effect transistor
- gate type
- silicon gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To get good IGFET for use in the high frequency region by decreasing the floating capacity among the gate electrode and the drain region.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8499676A JPS5245285A (en) | 1976-07-19 | 1976-07-19 | Manufacturing method of field effect transistor of silicon gate type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8499676A JPS5245285A (en) | 1976-07-19 | 1976-07-19 | Manufacturing method of field effect transistor of silicon gate type |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2667171A Division JPS5147311B1 (en) | 1971-04-26 | 1971-04-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5245285A true JPS5245285A (en) | 1977-04-09 |
JPS5227516B2 JPS5227516B2 (en) | 1977-07-20 |
Family
ID=13846231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8499676A Granted JPS5245285A (en) | 1976-07-19 | 1976-07-19 | Manufacturing method of field effect transistor of silicon gate type |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5245285A (en) |
-
1976
- 1976-07-19 JP JP8499676A patent/JPS5245285A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5227516B2 (en) | 1977-07-20 |
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