JPS5147311B1 - - Google Patents

Info

Publication number
JPS5147311B1
JPS5147311B1 JP2667171A JP2667171A JPS5147311B1 JP S5147311 B1 JPS5147311 B1 JP S5147311B1 JP 2667171 A JP2667171 A JP 2667171A JP 2667171 A JP2667171 A JP 2667171A JP S5147311 B1 JPS5147311 B1 JP S5147311B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2667171A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2667171A priority Critical patent/JPS5147311B1/ja
Publication of JPS5147311B1 publication Critical patent/JPS5147311B1/ja
Pending legal-status Critical Current

Links

JP2667171A 1971-04-26 1971-04-26 Pending JPS5147311B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2667171A JPS5147311B1 (en) 1971-04-26 1971-04-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2667171A JPS5147311B1 (en) 1971-04-26 1971-04-26

Related Child Applications (5)

Application Number Title Priority Date Filing Date
JP8499376A Division JPS5245282A (en) 1976-07-19 1976-07-19 Manufacturing method of field effect transistor of silicon gate type
JP51084997A Division JPS5245286A (en) 1976-07-19 1976-07-19 Manufcturing method of field effect transistor of silicon gate type
JP8499476A Division JPS5245283A (en) 1976-07-19 1976-07-19 Manufacturing method of field effect transistor of silicon gate type
JP51084995A Division JPS5245284A (en) 1976-07-19 1976-07-19 Manufcturing method of field effect transistor of silicon gate type
JP8499676A Division JPS5245285A (en) 1976-07-19 1976-07-19 Manufacturing method of field effect transistor of silicon gate type

Publications (1)

Publication Number Publication Date
JPS5147311B1 true JPS5147311B1 (en) 1976-12-14

Family

ID=12199848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2667171A Pending JPS5147311B1 (en) 1971-04-26 1971-04-26

Country Status (1)

Country Link
JP (1) JPS5147311B1 (en)

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