JPS5245282A - Manufacturing method of field effect transistor of silicon gate type - Google Patents
Manufacturing method of field effect transistor of silicon gate typeInfo
- Publication number
- JPS5245282A JPS5245282A JP8499376A JP8499376A JPS5245282A JP S5245282 A JPS5245282 A JP S5245282A JP 8499376 A JP8499376 A JP 8499376A JP 8499376 A JP8499376 A JP 8499376A JP S5245282 A JPS5245282 A JP S5245282A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- field effect
- effect transistor
- gate type
- silicon gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 230000005669 field effect Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8499376A JPS5245282A (en) | 1976-07-19 | 1976-07-19 | Manufacturing method of field effect transistor of silicon gate type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8499376A JPS5245282A (en) | 1976-07-19 | 1976-07-19 | Manufacturing method of field effect transistor of silicon gate type |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46026671A Division JPS5147311B1 (enrdf_load_html_response) | 1971-04-26 | 1971-04-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5245282A true JPS5245282A (en) | 1977-04-09 |
| JPS533230B2 JPS533230B2 (enrdf_load_html_response) | 1978-02-04 |
Family
ID=13846144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8499376A Granted JPS5245282A (en) | 1976-07-19 | 1976-07-19 | Manufacturing method of field effect transistor of silicon gate type |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5245282A (enrdf_load_html_response) |
-
1976
- 1976-07-19 JP JP8499376A patent/JPS5245282A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS533230B2 (enrdf_load_html_response) | 1978-02-04 |
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