JPS5244572A - Method of ion plating diamond - Google Patents

Method of ion plating diamond

Info

Publication number
JPS5244572A
JPS5244572A JP50120269A JP12026975A JPS5244572A JP S5244572 A JPS5244572 A JP S5244572A JP 50120269 A JP50120269 A JP 50120269A JP 12026975 A JP12026975 A JP 12026975A JP S5244572 A JPS5244572 A JP S5244572A
Authority
JP
Japan
Prior art keywords
ion plating
plating diamond
substrate
diamond
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50120269A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5615142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Toshiki Kadota
Hideo Yoshihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP50120269A priority Critical patent/JPS5244572A/ja
Publication of JPS5244572A publication Critical patent/JPS5244572A/ja
Publication of JPS5615142B2 publication Critical patent/JPS5615142B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP50120269A 1975-08-29 1975-08-29 Method of ion plating diamond Granted JPS5244572A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50120269A JPS5244572A (en) 1975-08-29 1975-08-29 Method of ion plating diamond

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50120269A JPS5244572A (en) 1975-08-29 1975-08-29 Method of ion plating diamond

Publications (2)

Publication Number Publication Date
JPS5244572A true JPS5244572A (en) 1977-04-07
JPS5615142B2 JPS5615142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-04-08

Family

ID=14782025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50120269A Granted JPS5244572A (en) 1975-08-29 1975-08-29 Method of ion plating diamond

Country Status (1)

Country Link
JP (1) JPS5244572A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53138989A (en) * 1977-05-10 1978-12-04 Koyo Seiko Co Ion plating method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879338A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-01-27 1973-10-24
JPS4999482A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-01-29 1974-09-19

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879338A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-01-27 1973-10-24
JPS4999482A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-01-29 1974-09-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53138989A (en) * 1977-05-10 1978-12-04 Koyo Seiko Co Ion plating method

Also Published As

Publication number Publication date
JPS5615142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-04-08

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