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Hitachi Ltd
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Hitachi Ltd
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Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP4996477ApriorityCriticalpatent/JPS53136072A/en
Publication of JPS53136072ApublicationCriticalpatent/JPS53136072A/en
PURPOSE: To foarm desired openings on a high polymer layer laminated on a base plate by coating the parts to be removed with metal layers, insolubilizing the rest parts by means of inert-gas spattering, and treating the resin layer, after the metal layers are removed, with the elching solution.
COPYRIGHT: (C)1978,JPO&Japio
JP4996477A1977-05-021977-05-02Selective etching of high polymer layer
PendingJPS53136072A
(en)