JPS5239385A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5239385A
JPS5239385A JP11481275A JP11481275A JPS5239385A JP S5239385 A JPS5239385 A JP S5239385A JP 11481275 A JP11481275 A JP 11481275A JP 11481275 A JP11481275 A JP 11481275A JP S5239385 A JPS5239385 A JP S5239385A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
faster
ohmic contact
metallic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11481275A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5731660B2 (enrdf_load_stackoverflow
Inventor
Shinichi Miyashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11481275A priority Critical patent/JPS5239385A/ja
Publication of JPS5239385A publication Critical patent/JPS5239385A/ja
Publication of JPS5731660B2 publication Critical patent/JPS5731660B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11481275A 1975-09-25 1975-09-25 Process for production of semiconductor device Granted JPS5239385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11481275A JPS5239385A (en) 1975-09-25 1975-09-25 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11481275A JPS5239385A (en) 1975-09-25 1975-09-25 Process for production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5239385A true JPS5239385A (en) 1977-03-26
JPS5731660B2 JPS5731660B2 (enrdf_load_stackoverflow) 1982-07-06

Family

ID=14647289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11481275A Granted JPS5239385A (en) 1975-09-25 1975-09-25 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5239385A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5624951A (en) * 1979-08-07 1981-03-10 Fujitsu Ltd Manufacture of semiconductor device
JPS5939050A (ja) * 1982-08-27 1984-03-03 Fujitsu Ltd 半導体装置の製造方法
US4659427A (en) * 1984-12-31 1987-04-21 Gte Laboratories Incorporated Via formation for multilayered metalization

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6118856A (ja) * 1984-07-06 1986-01-27 Fujikura Ltd センサの加熱方法
AU596538B2 (en) * 1987-09-03 1990-05-03 International Control Automation Finance Sa Method of applying an automotive type oxygen sensor for use in an industrial process analyzer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5624951A (en) * 1979-08-07 1981-03-10 Fujitsu Ltd Manufacture of semiconductor device
JPS5939050A (ja) * 1982-08-27 1984-03-03 Fujitsu Ltd 半導体装置の製造方法
US4659427A (en) * 1984-12-31 1987-04-21 Gte Laboratories Incorporated Via formation for multilayered metalization

Also Published As

Publication number Publication date
JPS5731660B2 (enrdf_load_stackoverflow) 1982-07-06

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