JPS5230168A - Method for fabrication of semiconductor device - Google Patents

Method for fabrication of semiconductor device

Info

Publication number
JPS5230168A
JPS5230168A JP10620075A JP10620075A JPS5230168A JP S5230168 A JPS5230168 A JP S5230168A JP 10620075 A JP10620075 A JP 10620075A JP 10620075 A JP10620075 A JP 10620075A JP S5230168 A JPS5230168 A JP S5230168A
Authority
JP
Japan
Prior art keywords
fabrication
semiconductor device
revelopment
prvent
contamination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10620075A
Other languages
Japanese (ja)
Inventor
Hiroshi Saikai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10620075A priority Critical patent/JPS5230168A/en
Publication of JPS5230168A publication Critical patent/JPS5230168A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To keep and protect the surface clean, to prevent revelopment of reversed layer in conduction type wiring and humidity on the protecting film of the surface, to improve accuracy of contact etching, and to prvent from contamination from the outside.
COPYRIGHT: (C)1977,JPO&Japio
JP10620075A 1975-09-02 1975-09-02 Method for fabrication of semiconductor device Pending JPS5230168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10620075A JPS5230168A (en) 1975-09-02 1975-09-02 Method for fabrication of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10620075A JPS5230168A (en) 1975-09-02 1975-09-02 Method for fabrication of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5230168A true JPS5230168A (en) 1977-03-07

Family

ID=14427513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10620075A Pending JPS5230168A (en) 1975-09-02 1975-09-02 Method for fabrication of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5230168A (en)

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