JPS522546A - Optical device to measure displacement of plane - Google Patents

Optical device to measure displacement of plane

Info

Publication number
JPS522546A
JPS522546A JP7805875A JP7805875A JPS522546A JP S522546 A JPS522546 A JP S522546A JP 7805875 A JP7805875 A JP 7805875A JP 7805875 A JP7805875 A JP 7805875A JP S522546 A JPS522546 A JP S522546A
Authority
JP
Japan
Prior art keywords
plane
optical device
measure displacement
displacement
measure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7805875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5347180B2 (enrdf_load_stackoverflow
Inventor
Kosuke Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7805875A priority Critical patent/JPS522546A/ja
Publication of JPS522546A publication Critical patent/JPS522546A/ja
Publication of JPS5347180B2 publication Critical patent/JPS5347180B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP7805875A 1975-06-24 1975-06-24 Optical device to measure displacement of plane Granted JPS522546A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7805875A JPS522546A (en) 1975-06-24 1975-06-24 Optical device to measure displacement of plane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7805875A JPS522546A (en) 1975-06-24 1975-06-24 Optical device to measure displacement of plane

Publications (2)

Publication Number Publication Date
JPS522546A true JPS522546A (en) 1977-01-10
JPS5347180B2 JPS5347180B2 (enrdf_load_stackoverflow) 1978-12-19

Family

ID=13651241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7805875A Granted JPS522546A (en) 1975-06-24 1975-06-24 Optical device to measure displacement of plane

Country Status (1)

Country Link
JP (1) JPS522546A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125507A (ja) * 1983-12-12 1985-07-04 Kita Denshi:Kk 印刷面の異同検出センサ−

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125507A (ja) * 1983-12-12 1985-07-04 Kita Denshi:Kk 印刷面の異同検出センサ−

Also Published As

Publication number Publication date
JPS5347180B2 (enrdf_load_stackoverflow) 1978-12-19

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