JPS5222486A - Method of manufacturing insb film element - Google Patents

Method of manufacturing insb film element

Info

Publication number
JPS5222486A
JPS5222486A JP50097652A JP9765275A JPS5222486A JP S5222486 A JPS5222486 A JP S5222486A JP 50097652 A JP50097652 A JP 50097652A JP 9765275 A JP9765275 A JP 9765275A JP S5222486 A JPS5222486 A JP S5222486A
Authority
JP
Japan
Prior art keywords
manufacturing
film element
insb film
insb
unform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50097652A
Other languages
Japanese (ja)
Inventor
Nobuo Kodera
Muneyasu Nakajima
Nobuo Miyamoto
Junji Shigeta
Tetsu Ooi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50097652A priority Critical patent/JPS5222486A/en
Publication of JPS5222486A publication Critical patent/JPS5222486A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain InSb elements of the unform thickness and uniform characteristics by forming InSb in concave places formed in the insulation layer on a substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP50097652A 1975-08-13 1975-08-13 Method of manufacturing insb film element Pending JPS5222486A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50097652A JPS5222486A (en) 1975-08-13 1975-08-13 Method of manufacturing insb film element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50097652A JPS5222486A (en) 1975-08-13 1975-08-13 Method of manufacturing insb film element

Publications (1)

Publication Number Publication Date
JPS5222486A true JPS5222486A (en) 1977-02-19

Family

ID=14198010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50097652A Pending JPS5222486A (en) 1975-08-13 1975-08-13 Method of manufacturing insb film element

Country Status (1)

Country Link
JP (1) JPS5222486A (en)

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