Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP50097652ApriorityCriticalpatent/JPS5222486A/en
Publication of JPS5222486ApublicationCriticalpatent/JPS5222486A/en
PURPOSE: To obtain InSb elements of the unform thickness and uniform characteristics by forming InSb in concave places formed in the insulation layer on a substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP50097652A1975-08-131975-08-13Method of manufacturing insb film element
PendingJPS5222486A
(en)