JPS522166A - Method of pulling out wiring from highly inpure dope layer - Google Patents

Method of pulling out wiring from highly inpure dope layer

Info

Publication number
JPS522166A
JPS522166A JP7657075A JP7657075A JPS522166A JP S522166 A JPS522166 A JP S522166A JP 7657075 A JP7657075 A JP 7657075A JP 7657075 A JP7657075 A JP 7657075A JP S522166 A JPS522166 A JP S522166A
Authority
JP
Japan
Prior art keywords
highly
inpure
dope layer
pulling out
out wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7657075A
Other languages
English (en)
Inventor
Tatsumi Shirasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7657075A priority Critical patent/JPS522166A/ja
Publication of JPS522166A publication Critical patent/JPS522166A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7657075A 1975-06-24 1975-06-24 Method of pulling out wiring from highly inpure dope layer Pending JPS522166A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7657075A JPS522166A (en) 1975-06-24 1975-06-24 Method of pulling out wiring from highly inpure dope layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7657075A JPS522166A (en) 1975-06-24 1975-06-24 Method of pulling out wiring from highly inpure dope layer

Publications (1)

Publication Number Publication Date
JPS522166A true JPS522166A (en) 1977-01-08

Family

ID=13608880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7657075A Pending JPS522166A (en) 1975-06-24 1975-06-24 Method of pulling out wiring from highly inpure dope layer

Country Status (1)

Country Link
JP (1) JPS522166A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54153614U (ja) * 1978-04-18 1979-10-25
US4333099A (en) * 1978-02-27 1982-06-01 Rca Corporation Use of silicide to bridge unwanted polycrystalline silicon P-N junction
JPS57120370A (en) * 1981-01-19 1982-07-27 Matsushita Electronics Corp Manufacture of semiconductor device
US4792841A (en) * 1980-08-15 1988-12-20 Hitachi, Ltd. Semiconductor devices and a process for producing the same
US4801559A (en) * 1981-07-21 1989-01-31 Fujitsu Limited Process for forming planar wiring using polysilicon to fill gaps

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4333099A (en) * 1978-02-27 1982-06-01 Rca Corporation Use of silicide to bridge unwanted polycrystalline silicon P-N junction
JPS54153614U (ja) * 1978-04-18 1979-10-25
US4792841A (en) * 1980-08-15 1988-12-20 Hitachi, Ltd. Semiconductor devices and a process for producing the same
JPS57120370A (en) * 1981-01-19 1982-07-27 Matsushita Electronics Corp Manufacture of semiconductor device
US4801559A (en) * 1981-07-21 1989-01-31 Fujitsu Limited Process for forming planar wiring using polysilicon to fill gaps

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