JPS5255877A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5255877A
JPS5255877A JP13161075A JP13161075A JPS5255877A JP S5255877 A JPS5255877 A JP S5255877A JP 13161075 A JP13161075 A JP 13161075A JP 13161075 A JP13161075 A JP 13161075A JP S5255877 A JPS5255877 A JP S5255877A
Authority
JP
Japan
Prior art keywords
semiconductor device
hamper
fabricated
integration
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13161075A
Other languages
Japanese (ja)
Inventor
Masanao Itoga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13161075A priority Critical patent/JPS5255877A/en
Publication of JPS5255877A publication Critical patent/JPS5255877A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To obtain an IC of higher scale of integration by forming isolations which are easy to fabricated and do not hamper wiring.
COPYRIGHT: (C)1977,JPO&Japio
JP13161075A 1975-11-01 1975-11-01 Semiconductor device Pending JPS5255877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13161075A JPS5255877A (en) 1975-11-01 1975-11-01 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13161075A JPS5255877A (en) 1975-11-01 1975-11-01 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5255877A true JPS5255877A (en) 1977-05-07

Family

ID=15062075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13161075A Pending JPS5255877A (en) 1975-11-01 1975-11-01 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5255877A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5432277A (en) * 1977-08-15 1979-03-09 Ibm Method of forming silicon area isolated from dielectric
JPS56160050A (en) * 1980-05-14 1981-12-09 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS5818938A (en) * 1981-07-27 1983-02-03 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン Integrated circuit structure
JPS58138047A (en) * 1982-02-10 1983-08-16 Nec Corp Manufacture of semiconductor device
JPS58138049A (en) * 1982-02-12 1983-08-16 Mitsubishi Electric Corp Manufacture of semiconductor ic
JPS58155738A (en) * 1982-03-11 1983-09-16 Mitsubishi Electric Corp Semiconductor integrated circuit and manufacture thereof
JPS59161836A (en) * 1983-03-04 1984-09-12 Sanyo Electric Co Ltd Semiconductor device
US5049521A (en) * 1989-11-30 1991-09-17 Silicon General, Inc. Method for forming dielectrically isolated semiconductor devices with contact to the wafer substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4942276A (en) * 1972-05-17 1974-04-20
JPS4979792A (en) * 1972-12-08 1974-08-01
JPS508316A (en) * 1973-05-25 1975-01-28

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4942276A (en) * 1972-05-17 1974-04-20
JPS4979792A (en) * 1972-12-08 1974-08-01
JPS508316A (en) * 1973-05-25 1975-01-28

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5432277A (en) * 1977-08-15 1979-03-09 Ibm Method of forming silicon area isolated from dielectric
JPS6220696B2 (en) * 1977-08-15 1987-05-08 Intaanashonaru Bijinesu Mashiinzu Corp
JPS56160050A (en) * 1980-05-14 1981-12-09 Fujitsu Ltd Semiconductor device and manufacture thereof
JPH0210575B2 (en) * 1980-05-14 1990-03-08 Fujitsu Ltd
JPS5818938A (en) * 1981-07-27 1983-02-03 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン Integrated circuit structure
JPH0429228B2 (en) * 1981-07-27 1992-05-18
JPS58138047A (en) * 1982-02-10 1983-08-16 Nec Corp Manufacture of semiconductor device
JPS58138049A (en) * 1982-02-12 1983-08-16 Mitsubishi Electric Corp Manufacture of semiconductor ic
JPS58155738A (en) * 1982-03-11 1983-09-16 Mitsubishi Electric Corp Semiconductor integrated circuit and manufacture thereof
JPS59161836A (en) * 1983-03-04 1984-09-12 Sanyo Electric Co Ltd Semiconductor device
US5049521A (en) * 1989-11-30 1991-09-17 Silicon General, Inc. Method for forming dielectrically isolated semiconductor devices with contact to the wafer substrate

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