JPS5218392A - Apparatus for analysis of electrn beam energy - Google Patents

Apparatus for analysis of electrn beam energy

Info

Publication number
JPS5218392A
JPS5218392A JP50094482A JP9448275A JPS5218392A JP S5218392 A JPS5218392 A JP S5218392A JP 50094482 A JP50094482 A JP 50094482A JP 9448275 A JP9448275 A JP 9448275A JP S5218392 A JPS5218392 A JP S5218392A
Authority
JP
Japan
Prior art keywords
electrn
analysis
beam energy
sweep voltage
amplitudeto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50094482A
Other languages
English (en)
Other versions
JPS5432355B2 (ja
Inventor
Akinori Mogami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP50094482A priority Critical patent/JPS5218392A/ja
Publication of JPS5218392A publication Critical patent/JPS5218392A/ja
Publication of JPS5432355B2 publication Critical patent/JPS5432355B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP50094482A 1975-08-02 1975-08-02 Apparatus for analysis of electrn beam energy Granted JPS5218392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50094482A JPS5218392A (en) 1975-08-02 1975-08-02 Apparatus for analysis of electrn beam energy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50094482A JPS5218392A (en) 1975-08-02 1975-08-02 Apparatus for analysis of electrn beam energy

Publications (2)

Publication Number Publication Date
JPS5218392A true JPS5218392A (en) 1977-02-10
JPS5432355B2 JPS5432355B2 (ja) 1979-10-13

Family

ID=14111489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50094482A Granted JPS5218392A (en) 1975-08-02 1975-08-02 Apparatus for analysis of electrn beam energy

Country Status (1)

Country Link
JP (1) JPS5218392A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150045A (ja) * 1985-08-09 1986-03-12 Nec Corp オージエ電子分光スペクトル測定方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150045A (ja) * 1985-08-09 1986-03-12 Nec Corp オージエ電子分光スペクトル測定方法
JPH0130101B2 (ja) * 1985-08-09 1989-06-16 Nippon Electric Co

Also Published As

Publication number Publication date
JPS5432355B2 (ja) 1979-10-13

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