JPS5432355B2 - - Google Patents

Info

Publication number
JPS5432355B2
JPS5432355B2 JP9448275A JP9448275A JPS5432355B2 JP S5432355 B2 JPS5432355 B2 JP S5432355B2 JP 9448275 A JP9448275 A JP 9448275A JP 9448275 A JP9448275 A JP 9448275A JP S5432355 B2 JPS5432355 B2 JP S5432355B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9448275A
Other versions
JPS5218392A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50094482A priority Critical patent/JPS5218392A/ja
Publication of JPS5218392A publication Critical patent/JPS5218392A/ja
Publication of JPS5432355B2 publication Critical patent/JPS5432355B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP50094482A 1975-08-02 1975-08-02 Apparatus for analysis of electrn beam energy Granted JPS5218392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50094482A JPS5218392A (en) 1975-08-02 1975-08-02 Apparatus for analysis of electrn beam energy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50094482A JPS5218392A (en) 1975-08-02 1975-08-02 Apparatus for analysis of electrn beam energy

Publications (2)

Publication Number Publication Date
JPS5218392A JPS5218392A (en) 1977-02-10
JPS5432355B2 true JPS5432355B2 (ja) 1979-10-13

Family

ID=14111489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50094482A Granted JPS5218392A (en) 1975-08-02 1975-08-02 Apparatus for analysis of electrn beam energy

Country Status (1)

Country Link
JP (1) JPS5218392A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150045A (ja) * 1985-08-09 1986-03-12 Nec Corp オージエ電子分光スペクトル測定方法

Also Published As

Publication number Publication date
JPS5218392A (en) 1977-02-10

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