JPS52155066A - Screening method of thin metal film wirings of semiconductor device - Google Patents
Screening method of thin metal film wirings of semiconductor deviceInfo
- Publication number
- JPS52155066A JPS52155066A JP7254376A JP7254376A JPS52155066A JP S52155066 A JPS52155066 A JP S52155066A JP 7254376 A JP7254376 A JP 7254376A JP 7254376 A JP7254376 A JP 7254376A JP S52155066 A JPS52155066 A JP S52155066A
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- thin metal
- semiconductor device
- screening method
- wirings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To perform screening of completed devices by beforehand forming thin metal film wirings for monitoring purpose of a required pattern simultaneously during production process at one corner of individual ICs and performing accelerated life test by flowing a large amplitude pulse current to said wirings.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7254376A JPS5917847B2 (en) | 1976-06-18 | 1976-06-18 | Screening method for metal thin film lines in semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7254376A JPS5917847B2 (en) | 1976-06-18 | 1976-06-18 | Screening method for metal thin film lines in semiconductor devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52155066A true JPS52155066A (en) | 1977-12-23 |
JPS5917847B2 JPS5917847B2 (en) | 1984-04-24 |
Family
ID=13492367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7254376A Expired JPS5917847B2 (en) | 1976-06-18 | 1976-06-18 | Screening method for metal thin film lines in semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5917847B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5683955A (en) * | 1979-12-13 | 1981-07-08 | Nec Corp | Manufacturing of semiconductor |
JPS56172028U (en) * | 1980-05-22 | 1981-12-18 | ||
JPS6283677A (en) * | 1985-10-08 | 1987-04-17 | Nec Corp | Apparatus for testing electromigration |
-
1976
- 1976-06-18 JP JP7254376A patent/JPS5917847B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5683955A (en) * | 1979-12-13 | 1981-07-08 | Nec Corp | Manufacturing of semiconductor |
JPH0147011B2 (en) * | 1979-12-13 | 1989-10-12 | Nippon Electric Co | |
JPS56172028U (en) * | 1980-05-22 | 1981-12-18 | ||
JPS6283677A (en) * | 1985-10-08 | 1987-04-17 | Nec Corp | Apparatus for testing electromigration |
Also Published As
Publication number | Publication date |
---|---|
JPS5917847B2 (en) | 1984-04-24 |
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