JPS52153667A - Photo mask of semiconductor integrated circuit - Google Patents

Photo mask of semiconductor integrated circuit

Info

Publication number
JPS52153667A
JPS52153667A JP7075776A JP7075776A JPS52153667A JP S52153667 A JPS52153667 A JP S52153667A JP 7075776 A JP7075776 A JP 7075776A JP 7075776 A JP7075776 A JP 7075776A JP S52153667 A JPS52153667 A JP S52153667A
Authority
JP
Japan
Prior art keywords
photo mask
integrated circuit
semiconductor integrated
photo
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7075776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5344796B2 (OSRAM
Inventor
Masami Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7075776A priority Critical patent/JPS52153667A/ja
Publication of JPS52153667A publication Critical patent/JPS52153667A/ja
Publication of JPS5344796B2 publication Critical patent/JPS5344796B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP7075776A 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit Granted JPS52153667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7075776A JPS52153667A (en) 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7075776A JPS52153667A (en) 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS52153667A true JPS52153667A (en) 1977-12-20
JPS5344796B2 JPS5344796B2 (OSRAM) 1978-12-01

Family

ID=13440689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7075776A Granted JPS52153667A (en) 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS52153667A (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52120551U (OSRAM) * 1976-03-03 1977-09-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52120551U (OSRAM) * 1976-03-03 1977-09-13

Also Published As

Publication number Publication date
JPS5344796B2 (OSRAM) 1978-12-01

Similar Documents

Publication Publication Date Title
JPS53112061A (en) Wiring substrate of semiconductor chip
JPS52153669A (en) Photo mask of semiconductor integrated circuit
JPS5351971A (en) Manufacture for semiconductor
JPS52153667A (en) Photo mask of semiconductor integrated circuit
JPS5389673A (en) Fine pattern forming method of semiconductor device
JPS5318966A (en) Production of semiconductor integrated circuit
JPS5342659A (en) Semiconductor integrated circuit
JPS52153668A (en) Photo mask of semiconductor integrated circuit
JPS51111073A (en) Fine pattern forming
JPS5421273A (en) Manufacture for photo mask
JPS51136234A (en) Solid state image device
JPS525270A (en) Photo-mask
JPS51134084A (en) Element for transmission line circuit
JPS52153670A (en) Photo mask of semiconductor integrated circuit
JPS5254379A (en) Method of registering front and rear patterns
JPS53116090A (en) Through-hole forming method for semiconductor integrated circuit
JPS53121468A (en) Manufacture for semiconductor device
JPS5361968A (en) Production of semiconductor device
JPS5325387A (en) Solar battery watch
JPS52127191A (en) Solid statelight emision display unit
JPS539488A (en) Production of semiconductor device
JPS5243427A (en) Method for photoengraving light sensitive resin
JPS5284448A (en) Constant current circuit
JPS533772A (en) Production of semiconductor device
JPS53124993A (en) Production of semiconductor device