JPS52147977A - Electronic lens unit - Google Patents

Electronic lens unit

Info

Publication number
JPS52147977A
JPS52147977A JP3764276A JP3764276A JPS52147977A JP S52147977 A JPS52147977 A JP S52147977A JP 3764276 A JP3764276 A JP 3764276A JP 3764276 A JP3764276 A JP 3764276A JP S52147977 A JPS52147977 A JP S52147977A
Authority
JP
Japan
Prior art keywords
lens unit
electronic lens
electronic
accord
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3764276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5337710B2 (enExample
Inventor
Hidekazu Goto
Takashi Soma
Masanori Idesawa
Sakae Miyauchi
Kazumitsu Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
RIKEN
Original Assignee
Jeol Ltd
Nihon Denshi KK
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, RIKEN filed Critical Jeol Ltd
Priority to JP3764276A priority Critical patent/JPS52147977A/ja
Publication of JPS52147977A publication Critical patent/JPS52147977A/ja
Publication of JPS5337710B2 publication Critical patent/JPS5337710B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP3764276A 1976-04-02 1976-04-02 Electronic lens unit Granted JPS52147977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3764276A JPS52147977A (en) 1976-04-02 1976-04-02 Electronic lens unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3764276A JPS52147977A (en) 1976-04-02 1976-04-02 Electronic lens unit

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP7413677A Division JPS5328379A (en) 1977-06-22 1977-06-22 Electron lens device

Publications (2)

Publication Number Publication Date
JPS52147977A true JPS52147977A (en) 1977-12-08
JPS5337710B2 JPS5337710B2 (enExample) 1978-10-11

Family

ID=12503296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3764276A Granted JPS52147977A (en) 1976-04-02 1976-04-02 Electronic lens unit

Country Status (1)

Country Link
JP (1) JPS52147977A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS538064A (en) * 1976-05-14 1978-01-25 Thomson Csf Particle optical device
JP2014049545A (ja) * 2012-08-30 2014-03-17 Nuflare Technology Inc 荷電粒子ビーム描画方法及び荷電粒子ビーム描画装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117574A (en) * 1976-03-30 1977-10-03 Toshiba Corp Electronic beam exposure unit
JPS52119080A (en) * 1976-03-31 1977-10-06 Fujitsu Ltd Electron beam exposure

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117574A (en) * 1976-03-30 1977-10-03 Toshiba Corp Electronic beam exposure unit
JPS52119080A (en) * 1976-03-31 1977-10-06 Fujitsu Ltd Electron beam exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS538064A (en) * 1976-05-14 1978-01-25 Thomson Csf Particle optical device
JP2014049545A (ja) * 2012-08-30 2014-03-17 Nuflare Technology Inc 荷電粒子ビーム描画方法及び荷電粒子ビーム描画装置

Also Published As

Publication number Publication date
JPS5337710B2 (enExample) 1978-10-11

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