JPS5357761A - Electron beam exposure apparatus - Google Patents
Electron beam exposure apparatusInfo
- Publication number
- JPS5357761A JPS5357761A JP13261576A JP13261576A JPS5357761A JP S5357761 A JPS5357761 A JP S5357761A JP 13261576 A JP13261576 A JP 13261576A JP 13261576 A JP13261576 A JP 13261576A JP S5357761 A JPS5357761 A JP S5357761A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure apparatus
- beam exposure
- diaphragms
- simplify
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To simplify the correction of the rotation of electron beams and the position deviation of diaphragms by independently adjusting the positions of two sheets of diaphragms with the electric signal from the outside.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13261576A JPS5357761A (en) | 1976-11-04 | 1976-11-04 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13261576A JPS5357761A (en) | 1976-11-04 | 1976-11-04 | Electron beam exposure apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5357761A true JPS5357761A (en) | 1978-05-25 |
JPS5649444B2 JPS5649444B2 (en) | 1981-11-21 |
Family
ID=15085460
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13261576A Granted JPS5357761A (en) | 1976-11-04 | 1976-11-04 | Electron beam exposure apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5357761A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6349448U (en) * | 1986-09-18 | 1988-04-04 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52132783A (en) * | 1976-04-30 | 1977-11-07 | Jeol Ltd | Electron ray exposure unit |
-
1976
- 1976-11-04 JP JP13261576A patent/JPS5357761A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52132783A (en) * | 1976-04-30 | 1977-11-07 | Jeol Ltd | Electron ray exposure unit |
Also Published As
Publication number | Publication date |
---|---|
JPS5649444B2 (en) | 1981-11-21 |
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