JPS52143782A - Construction of complementary mis-ic and its production - Google Patents

Construction of complementary mis-ic and its production

Info

Publication number
JPS52143782A
JPS52143782A JP6004676A JP6004676A JPS52143782A JP S52143782 A JPS52143782 A JP S52143782A JP 6004676 A JP6004676 A JP 6004676A JP 6004676 A JP6004676 A JP 6004676A JP S52143782 A JPS52143782 A JP S52143782A
Authority
JP
Japan
Prior art keywords
construction
production
complementary mis
integration
decreasing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6004676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS638623B2 (ko
Inventor
Yasunobu Osa
Koichi Nagasawa
Satoshi Meguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6004676A priority Critical patent/JPS52143782A/ja
Publication of JPS52143782A publication Critical patent/JPS52143782A/ja
Publication of JPS638623B2 publication Critical patent/JPS638623B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP6004676A 1976-05-26 1976-05-26 Construction of complementary mis-ic and its production Granted JPS52143782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6004676A JPS52143782A (en) 1976-05-26 1976-05-26 Construction of complementary mis-ic and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6004676A JPS52143782A (en) 1976-05-26 1976-05-26 Construction of complementary mis-ic and its production

Publications (2)

Publication Number Publication Date
JPS52143782A true JPS52143782A (en) 1977-11-30
JPS638623B2 JPS638623B2 (ko) 1988-02-23

Family

ID=13130734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6004676A Granted JPS52143782A (en) 1976-05-26 1976-05-26 Construction of complementary mis-ic and its production

Country Status (1)

Country Link
JP (1) JPS52143782A (ko)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56501145A (ko) * 1979-09-20 1981-08-13
JPS5766659A (en) * 1980-10-09 1982-04-22 Toshiba Corp Manufacture of complementary mos semiconductor device
JPS5779667A (en) * 1980-11-05 1982-05-18 Fujitsu Ltd Manufacture of semiconductor device
JPS5878453A (ja) * 1981-08-31 1983-05-12 ヒューズ・エアクラフト・カンパニー Ｃｍｏｓ半導体の製造方法
JPS6097663A (ja) * 1983-10-07 1985-05-31 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン 集積回路
JPH0575042A (ja) * 1992-03-05 1993-03-26 Seiko Epson Corp 半導体装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829376A (ko) * 1971-08-03 1973-04-18
JPS4846275A (ko) * 1971-10-07 1973-07-02

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829376A (ko) * 1971-08-03 1973-04-18
JPS4846275A (ko) * 1971-10-07 1973-07-02

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56501145A (ko) * 1979-09-20 1981-08-13
JPS5766659A (en) * 1980-10-09 1982-04-22 Toshiba Corp Manufacture of complementary mos semiconductor device
JPS5779667A (en) * 1980-11-05 1982-05-18 Fujitsu Ltd Manufacture of semiconductor device
JPS5878453A (ja) * 1981-08-31 1983-05-12 ヒューズ・エアクラフト・カンパニー Ｃｍｏｓ半導体の製造方法
JPS6097663A (ja) * 1983-10-07 1985-05-31 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン 集積回路
JPH0321101B2 (ko) * 1983-10-07 1991-03-20 Fuiritsupusu Furuuiranpenfuaburiken Nv
JPH0575042A (ja) * 1992-03-05 1993-03-26 Seiko Epson Corp 半導体装置

Also Published As

Publication number Publication date
JPS638623B2 (ko) 1988-02-23

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