JPS52142978A - Production of semiconductor integrated circuit device - Google Patents
Production of semiconductor integrated circuit deviceInfo
- Publication number
- JPS52142978A JPS52142978A JP6024376A JP6024376A JPS52142978A JP S52142978 A JPS52142978 A JP S52142978A JP 6024376 A JP6024376 A JP 6024376A JP 6024376 A JP6024376 A JP 6024376A JP S52142978 A JPS52142978 A JP S52142978A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- circuit device
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Abstract
PURPOSE: To achieve the improvement in current gain and the decrease in power consumption by forming p type buried layers within an n type epitaxial layer by an ion implantation method then forming P+ layers in base and injector regions other than collectors through P+ ion implantation.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6024376A JPS52142978A (en) | 1976-05-24 | 1976-05-24 | Production of semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6024376A JPS52142978A (en) | 1976-05-24 | 1976-05-24 | Production of semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52142978A true JPS52142978A (en) | 1977-11-29 |
Family
ID=13136531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6024376A Pending JPS52142978A (en) | 1976-05-24 | 1976-05-24 | Production of semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52142978A (en) |
-
1976
- 1976-05-24 JP JP6024376A patent/JPS52142978A/en active Pending
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