JPS52142978A - Production of semiconductor integrated circuit device - Google Patents

Production of semiconductor integrated circuit device

Info

Publication number
JPS52142978A
JPS52142978A JP6024376A JP6024376A JPS52142978A JP S52142978 A JPS52142978 A JP S52142978A JP 6024376 A JP6024376 A JP 6024376A JP 6024376 A JP6024376 A JP 6024376A JP S52142978 A JPS52142978 A JP S52142978A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
circuit device
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6024376A
Other languages
Japanese (ja)
Inventor
Koichi Kijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6024376A priority Critical patent/JPS52142978A/en
Publication of JPS52142978A publication Critical patent/JPS52142978A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)

Abstract

PURPOSE: To achieve the improvement in current gain and the decrease in power consumption by forming p type buried layers within an n type epitaxial layer by an ion implantation method then forming P+ layers in base and injector regions other than collectors through P+ ion implantation.
COPYRIGHT: (C)1977,JPO&Japio
JP6024376A 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device Pending JPS52142978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6024376A JPS52142978A (en) 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6024376A JPS52142978A (en) 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS52142978A true JPS52142978A (en) 1977-11-29

Family

ID=13136531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6024376A Pending JPS52142978A (en) 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS52142978A (en)

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