JPS52141177A - Assigning method of pattern inspection areas - Google Patents

Assigning method of pattern inspection areas

Info

Publication number
JPS52141177A
JPS52141177A JP5667576A JP5667576A JPS52141177A JP S52141177 A JPS52141177 A JP S52141177A JP 5667576 A JP5667576 A JP 5667576A JP 5667576 A JP5667576 A JP 5667576A JP S52141177 A JPS52141177 A JP S52141177A
Authority
JP
Japan
Prior art keywords
pattern inspection
inspection areas
assigning method
block
chips
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5667576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5413749B2 (enrdf_load_stackoverflow
Inventor
Takeji Harada
Hiroichi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5667576A priority Critical patent/JPS52141177A/ja
Publication of JPS52141177A publication Critical patent/JPS52141177A/ja
Publication of JPS5413749B2 publication Critical patent/JPS5413749B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP5667576A 1976-05-19 1976-05-19 Assigning method of pattern inspection areas Granted JPS52141177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5667576A JPS52141177A (en) 1976-05-19 1976-05-19 Assigning method of pattern inspection areas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5667576A JPS52141177A (en) 1976-05-19 1976-05-19 Assigning method of pattern inspection areas

Publications (2)

Publication Number Publication Date
JPS52141177A true JPS52141177A (en) 1977-11-25
JPS5413749B2 JPS5413749B2 (enrdf_load_stackoverflow) 1979-06-01

Family

ID=13033985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5667576A Granted JPS52141177A (en) 1976-05-19 1976-05-19 Assigning method of pattern inspection areas

Country Status (1)

Country Link
JP (1) JPS52141177A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5413749B2 (enrdf_load_stackoverflow) 1979-06-01

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