JPS52138183A - Inspecting apparatus for flaw - Google Patents

Inspecting apparatus for flaw

Info

Publication number
JPS52138183A
JPS52138183A JP5485876A JP5485876A JPS52138183A JP S52138183 A JPS52138183 A JP S52138183A JP 5485876 A JP5485876 A JP 5485876A JP 5485876 A JP5485876 A JP 5485876A JP S52138183 A JPS52138183 A JP S52138183A
Authority
JP
Japan
Prior art keywords
flaw
polarized light
inspecting apparatus
competent
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5485876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5632581B2 (OSRAM
Inventor
Masayoshi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5485876A priority Critical patent/JPS52138183A/ja
Publication of JPS52138183A publication Critical patent/JPS52138183A/ja
Publication of JPS5632581B2 publication Critical patent/JPS5632581B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP5485876A 1976-05-14 1976-05-14 Inspecting apparatus for flaw Granted JPS52138183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5485876A JPS52138183A (en) 1976-05-14 1976-05-14 Inspecting apparatus for flaw

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5485876A JPS52138183A (en) 1976-05-14 1976-05-14 Inspecting apparatus for flaw

Publications (2)

Publication Number Publication Date
JPS52138183A true JPS52138183A (en) 1977-11-18
JPS5632581B2 JPS5632581B2 (OSRAM) 1981-07-29

Family

ID=12982279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5485876A Granted JPS52138183A (en) 1976-05-14 1976-05-14 Inspecting apparatus for flaw

Country Status (1)

Country Link
JP (1) JPS52138183A (OSRAM)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS60122359A (ja) * 1984-07-04 1985-06-29 Hitachi Ltd 光学検査装置
JPS6270738A (ja) * 1985-09-25 1987-04-01 Hitachi Electronics Eng Co Ltd 異物検出方法
US5835220A (en) * 1995-10-27 1998-11-10 Nkk Corporation Method and apparatus for detecting surface flaws
JP2013033017A (ja) * 2011-06-30 2013-02-14 National Institute Of Advanced Industrial & Technology 表面検査装置、表面検査方法、表面検査プログラム、およびコンピュータ読み取り可能な記録媒体
JP2018073709A (ja) * 2016-11-01 2018-05-10 凸版印刷株式会社 電極触媒層、膜電極接合体及び固体高分子形燃料電池
JP2021043210A (ja) * 2016-03-31 2021-03-18 凸版印刷株式会社 膜電極接合体の検査装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101237583B1 (ko) * 2007-10-23 2013-02-26 시바우라 메카트로닉스 가부시키가이샤 촬영 화상에 기초한 검사 방법 및 검사 장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495689A (OSRAM) * 1972-04-13 1974-01-18
JPS4999086A (OSRAM) * 1973-01-26 1974-09-19

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495689A (OSRAM) * 1972-04-13 1974-01-18
JPS4999086A (OSRAM) * 1973-01-26 1974-09-19

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS60122359A (ja) * 1984-07-04 1985-06-29 Hitachi Ltd 光学検査装置
JPS6270738A (ja) * 1985-09-25 1987-04-01 Hitachi Electronics Eng Co Ltd 異物検出方法
US5835220A (en) * 1995-10-27 1998-11-10 Nkk Corporation Method and apparatus for detecting surface flaws
JP2013033017A (ja) * 2011-06-30 2013-02-14 National Institute Of Advanced Industrial & Technology 表面検査装置、表面検査方法、表面検査プログラム、およびコンピュータ読み取り可能な記録媒体
JP2021043210A (ja) * 2016-03-31 2021-03-18 凸版印刷株式会社 膜電極接合体の検査装置
JP2018073709A (ja) * 2016-11-01 2018-05-10 凸版印刷株式会社 電極触媒層、膜電極接合体及び固体高分子形燃料電池

Also Published As

Publication number Publication date
JPS5632581B2 (OSRAM) 1981-07-29

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