JPS52137979A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52137979A
JPS52137979A JP5489576A JP5489576A JPS52137979A JP S52137979 A JPS52137979 A JP S52137979A JP 5489576 A JP5489576 A JP 5489576A JP 5489576 A JP5489576 A JP 5489576A JP S52137979 A JPS52137979 A JP S52137979A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
remove
epitaxial layer
active element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5489576A
Other languages
English (en)
Inventor
Kazunori Imaoka
Shuichi Ohashi
Fumio Yanagihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5489576A priority Critical patent/JPS52137979A/ja
Publication of JPS52137979A publication Critical patent/JPS52137979A/ja
Pending legal-status Critical Current

Links

JP5489576A 1976-05-14 1976-05-14 Production of semiconductor device Pending JPS52137979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5489576A JPS52137979A (en) 1976-05-14 1976-05-14 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5489576A JPS52137979A (en) 1976-05-14 1976-05-14 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52137979A true JPS52137979A (en) 1977-11-17

Family

ID=12983325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5489576A Pending JPS52137979A (en) 1976-05-14 1976-05-14 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52137979A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5776829A (en) * 1980-10-31 1982-05-14 Fujitsu Ltd Manufacture of semiconductor substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5776829A (en) * 1980-10-31 1982-05-14 Fujitsu Ltd Manufacture of semiconductor substrate

Similar Documents

Publication Publication Date Title
JPS5293285A (en) Structure for semiconductor device
JPS5324277A (en) Semiconductor devic e and its production
JPS5333050A (en) Production of semiconductor element
JPS52137979A (en) Production of semiconductor device
JPS53104162A (en) Forming method for epitaxial layer on semiconductor wafer
JPS5342579A (en) Pressure-electricity transducer and its production
NL7709714A (nl) Werkwijze voor de vervaardiging van epitaxiale lagen op monokristallijne substraten volgens de vloeistof-schuifepitaxie.
JPS5329668A (en) Production of semiconductor device
JPS52124860A (en) Electrode formation method for semiconductor devices
JPS5293277A (en) Semiconductor device and its manufacture
JPS53104185A (en) Production of semiconductor device
JPS5270752A (en) Manufacture of semiconductor device
JPS52104072A (en) High voltage semiconductor device
JPS53143183A (en) Semicondutor integrated circuit device and production of the same
JPS5368165A (en) Production of semiconductor device
JPS538571A (en) Manufacture of inverted-mesa type semiconductor device
JPS53131765A (en) Production of semiconductor device
JPS5298491A (en) Thin-sheet piezo-electric vibrator
JPS539488A (en) Production of semiconductor device
JPS539478A (en) Production of semiconductor device having pn junctions
JPS5336180A (en) Production of semiconductor device
JPS5291681A (en) Vibrator crystal plate and manufacture of it
JPS533788A (en) Frequency adjustment method of crystal vibrator
JPS5351981A (en) Manufacture for semiconductor device
JPS5263067A (en) Production of semiconductor device

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20040629

A313 Final decision of rejection without a dissenting response from the applicant

Free format text: JAPANESE INTERMEDIATE CODE: A313

Effective date: 20041108

A02 Decision of refusal

Effective date: 20050628

Free format text: JAPANESE INTERMEDIATE CODE: A02