JPS52135684A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52135684A
JPS52135684A JP5214676A JP5214676A JPS52135684A JP S52135684 A JPS52135684 A JP S52135684A JP 5214676 A JP5214676 A JP 5214676A JP 5214676 A JP5214676 A JP 5214676A JP S52135684 A JPS52135684 A JP S52135684A
Authority
JP
Japan
Prior art keywords
high concentration
production
semiconductor device
film containing
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5214676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5619107B2 (enrdf_load_stackoverflow
Inventor
Kei Kirita
Takahiko Moriya
Yasutaka Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5214676A priority Critical patent/JPS52135684A/ja
Priority to US05/738,841 priority patent/US4063973A/en
Publication of JPS52135684A publication Critical patent/JPS52135684A/ja
Publication of JPS5619107B2 publication Critical patent/JPS5619107B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP5214676A 1975-11-10 1976-05-10 Production of semiconductor device Granted JPS52135684A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP5214676A JPS52135684A (en) 1976-05-10 1976-05-10 Production of semiconductor device
US05/738,841 US4063973A (en) 1975-11-10 1976-11-04 Method of making a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5214676A JPS52135684A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52135684A true JPS52135684A (en) 1977-11-12
JPS5619107B2 JPS5619107B2 (enrdf_load_stackoverflow) 1981-05-06

Family

ID=12906727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5214676A Granted JPS52135684A (en) 1975-11-10 1976-05-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52135684A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5619107B2 (enrdf_load_stackoverflow) 1981-05-06

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