JPS52127767A - Plasma etching method - Google Patents

Plasma etching method

Info

Publication number
JPS52127767A
JPS52127767A JP4461276A JP4461276A JPS52127767A JP S52127767 A JPS52127767 A JP S52127767A JP 4461276 A JP4461276 A JP 4461276A JP 4461276 A JP4461276 A JP 4461276A JP S52127767 A JPS52127767 A JP S52127767A
Authority
JP
Japan
Prior art keywords
plasma etching
etching method
etching
speed
arranging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4461276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS565060B2 (enrdf_load_stackoverflow
Inventor
Masanao Itoga
Junji Sato
Toshiro Ichikawa
Minoru Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4461276A priority Critical patent/JPS52127767A/ja
Publication of JPS52127767A publication Critical patent/JPS52127767A/ja
Publication of JPS565060B2 publication Critical patent/JPS565060B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP4461276A 1976-04-19 1976-04-19 Plasma etching method Granted JPS52127767A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4461276A JPS52127767A (en) 1976-04-19 1976-04-19 Plasma etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4461276A JPS52127767A (en) 1976-04-19 1976-04-19 Plasma etching method

Publications (2)

Publication Number Publication Date
JPS52127767A true JPS52127767A (en) 1977-10-26
JPS565060B2 JPS565060B2 (enrdf_load_stackoverflow) 1981-02-03

Family

ID=12696254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4461276A Granted JPS52127767A (en) 1976-04-19 1976-04-19 Plasma etching method

Country Status (1)

Country Link
JP (1) JPS52127767A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6254719B1 (en) * 1997-10-17 2001-07-03 International Business Machines Corporation Method for controlled removal of material from a solid surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6254719B1 (en) * 1997-10-17 2001-07-03 International Business Machines Corporation Method for controlled removal of material from a solid surface

Also Published As

Publication number Publication date
JPS565060B2 (enrdf_load_stackoverflow) 1981-02-03

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