JPS565060B2 - - Google Patents

Info

Publication number
JPS565060B2
JPS565060B2 JP4461276A JP4461276A JPS565060B2 JP S565060 B2 JPS565060 B2 JP S565060B2 JP 4461276 A JP4461276 A JP 4461276A JP 4461276 A JP4461276 A JP 4461276A JP S565060 B2 JPS565060 B2 JP S565060B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4461276A
Other languages
Japanese (ja)
Other versions
JPS52127767A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4461276A priority Critical patent/JPS52127767A/ja
Publication of JPS52127767A publication Critical patent/JPS52127767A/ja
Publication of JPS565060B2 publication Critical patent/JPS565060B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP4461276A 1976-04-19 1976-04-19 Plasma etching method Granted JPS52127767A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4461276A JPS52127767A (en) 1976-04-19 1976-04-19 Plasma etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4461276A JPS52127767A (en) 1976-04-19 1976-04-19 Plasma etching method

Publications (2)

Publication Number Publication Date
JPS52127767A JPS52127767A (en) 1977-10-26
JPS565060B2 true JPS565060B2 (enrdf_load_stackoverflow) 1981-02-03

Family

ID=12696254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4461276A Granted JPS52127767A (en) 1976-04-19 1976-04-19 Plasma etching method

Country Status (1)

Country Link
JP (1) JPS52127767A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6022485A (en) * 1997-10-17 2000-02-08 International Business Machines Corporation Method for controlled removal of material from a solid surface

Also Published As

Publication number Publication date
JPS52127767A (en) 1977-10-26

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