JPS52119863A - Manufacture of semi-conductor device - Google Patents

Manufacture of semi-conductor device

Info

Publication number
JPS52119863A
JPS52119863A JP3600176A JP3600176A JPS52119863A JP S52119863 A JPS52119863 A JP S52119863A JP 3600176 A JP3600176 A JP 3600176A JP 3600176 A JP3600176 A JP 3600176A JP S52119863 A JPS52119863 A JP S52119863A
Authority
JP
Japan
Prior art keywords
semi
manufacture
resin
conductor device
intermediary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3600176A
Other languages
English (en)
Inventor
Ichisuke Yamanaka
Atsushi Saiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3600176A priority Critical patent/JPS52119863A/ja
Publication of JPS52119863A publication Critical patent/JPS52119863A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP3600176A 1976-04-02 1976-04-02 Manufacture of semi-conductor device Pending JPS52119863A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3600176A JPS52119863A (en) 1976-04-02 1976-04-02 Manufacture of semi-conductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3600176A JPS52119863A (en) 1976-04-02 1976-04-02 Manufacture of semi-conductor device

Publications (1)

Publication Number Publication Date
JPS52119863A true JPS52119863A (en) 1977-10-07

Family

ID=12457537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3600176A Pending JPS52119863A (en) 1976-04-02 1976-04-02 Manufacture of semi-conductor device

Country Status (1)

Country Link
JP (1) JPS52119863A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202556A (ja) * 1982-05-21 1983-11-25 Hitachi Ltd 半導体装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202556A (ja) * 1982-05-21 1983-11-25 Hitachi Ltd 半導体装置
JPS6322616B2 (ja) * 1982-05-21 1988-05-12 Hitachi Ltd

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