JPS5210685A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5210685A JPS5210685A JP8614975A JP8614975A JPS5210685A JP S5210685 A JPS5210685 A JP S5210685A JP 8614975 A JP8614975 A JP 8614975A JP 8614975 A JP8614975 A JP 8614975A JP S5210685 A JPS5210685 A JP S5210685A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- semiconductor
- checking
- yield
- arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To improve reliability and yield of a semiconductor having the multilayer wiring construction by checking an alloying reaction of Si with Al with arrangement of a contact hole.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8614975A JPS5210685A (en) | 1975-07-16 | 1975-07-16 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8614975A JPS5210685A (en) | 1975-07-16 | 1975-07-16 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5210685A true JPS5210685A (en) | 1977-01-27 |
Family
ID=13878672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8614975A Pending JPS5210685A (en) | 1975-07-16 | 1975-07-16 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5210685A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5216189A (en) * | 1975-07-29 | 1977-02-07 | Toshiba Corp | Semiconductor device |
JPS5669420A (en) * | 1979-11-08 | 1981-06-10 | Mazda Motor Corp | Intake device for rotary piston engine |
US6307273B1 (en) * | 1996-06-07 | 2001-10-23 | Vanguard International Semiconductor Corporation | High contrast, low noise alignment mark for laser trimming of redundant memory arrays |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911277A (en) * | 1972-05-29 | 1974-01-31 |
-
1975
- 1975-07-16 JP JP8614975A patent/JPS5210685A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911277A (en) * | 1972-05-29 | 1974-01-31 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5216189A (en) * | 1975-07-29 | 1977-02-07 | Toshiba Corp | Semiconductor device |
JPS5816338B2 (en) * | 1975-07-29 | 1983-03-30 | 株式会社東芝 | Hand tie souchi |
JPS5669420A (en) * | 1979-11-08 | 1981-06-10 | Mazda Motor Corp | Intake device for rotary piston engine |
JPS591335B2 (en) * | 1979-11-08 | 1984-01-11 | マツダ株式会社 | Rotary piston engine intake system |
US6307273B1 (en) * | 1996-06-07 | 2001-10-23 | Vanguard International Semiconductor Corporation | High contrast, low noise alignment mark for laser trimming of redundant memory arrays |
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