JPS52119080A - Electron beam exposure - Google Patents
Electron beam exposureInfo
- Publication number
- JPS52119080A JPS52119080A JP3540376A JP3540376A JPS52119080A JP S52119080 A JPS52119080 A JP S52119080A JP 3540376 A JP3540376 A JP 3540376A JP 3540376 A JP3540376 A JP 3540376A JP S52119080 A JPS52119080 A JP S52119080A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- beam exposure
- slit plates
- bya
- revolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3540376A JPS52119080A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3540376A JPS52119080A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52119080A true JPS52119080A (en) | 1977-10-06 |
JPS568491B2 JPS568491B2 (bg) | 1981-02-24 |
Family
ID=12440932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3540376A Granted JPS52119080A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52119080A (bg) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52147977A (en) * | 1976-04-02 | 1977-12-08 | Jeol Ltd | Electronic lens unit |
JPS5328379A (en) * | 1977-06-22 | 1978-03-16 | Jeol Ltd | Electron lens device |
-
1976
- 1976-03-31 JP JP3540376A patent/JPS52119080A/ja active Granted
Non-Patent Citations (1)
Title |
---|
AN ELECTRON EXPOSURE SYSTEM FOR RECORDING AND PRINTING=1972 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52147977A (en) * | 1976-04-02 | 1977-12-08 | Jeol Ltd | Electronic lens unit |
JPS5337710B2 (bg) * | 1976-04-02 | 1978-10-11 | ||
JPS5328379A (en) * | 1977-06-22 | 1978-03-16 | Jeol Ltd | Electron lens device |
JPS5334470B2 (bg) * | 1977-06-22 | 1978-09-20 |
Also Published As
Publication number | Publication date |
---|---|
JPS568491B2 (bg) | 1981-02-24 |
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