DE3381033D1 - Elektronenstrahl-belichtungsverfahren. - Google Patents

Elektronenstrahl-belichtungsverfahren.

Info

Publication number
DE3381033D1
DE3381033D1 DE8383106013T DE3381033T DE3381033D1 DE 3381033 D1 DE3381033 D1 DE 3381033D1 DE 8383106013 T DE8383106013 T DE 8383106013T DE 3381033 T DE3381033 T DE 3381033T DE 3381033 D1 DE3381033 D1 DE 3381033D1
Authority
DE
Germany
Prior art keywords
electron beam
exposure method
beam exposure
electron
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8383106013T
Other languages
English (en)
Inventor
Fumio Komatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3381033D1 publication Critical patent/DE3381033D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31769—Proximity effect correction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31769—Proximity effect correction
    • H01J2237/31771—Proximity effect correction using multiple exposure

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE8383106013T 1982-06-30 1983-06-20 Elektronenstrahl-belichtungsverfahren. Expired - Lifetime DE3381033D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57112986A JPS594017A (ja) 1982-06-30 1982-06-30 電子ビ−ム露光方法

Publications (1)

Publication Number Publication Date
DE3381033D1 true DE3381033D1 (de) 1990-02-01

Family

ID=14600546

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383106013T Expired - Lifetime DE3381033D1 (de) 1982-06-30 1983-06-20 Elektronenstrahl-belichtungsverfahren.

Country Status (4)

Country Link
US (1) US4644170A (de)
EP (1) EP0097903B1 (de)
JP (1) JPS594017A (de)
DE (1) DE3381033D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4712013A (en) * 1984-09-29 1987-12-08 Kabushiki Kaisha Toshiba Method of forming a fine pattern with a charged particle beam
JPS6229135A (ja) * 1985-07-29 1987-02-07 Advantest Corp 荷電粒子ビ−ム露光方法及びこの方法を用いた荷電粒子ビ−ム露光装置
JPH0645021Y2 (ja) * 1989-03-10 1994-11-16 サンウエーブ工業株式会社 ヒンジ装置
US5051598A (en) * 1990-09-12 1991-09-24 International Business Machines Corporation Method for correcting proximity effects in electron beam lithography
US6534242B2 (en) 1997-11-06 2003-03-18 Canon Kabushiki Kaisha Multiple exposure device formation
US6377337B1 (en) 1998-05-02 2002-04-23 Canon Kabushiki Kaisha Projection exposure apparatus
JP3352405B2 (ja) 1998-09-10 2002-12-03 キヤノン株式会社 露光方法及びそれを用いたデバイス製造方法並びに半導体デバイス
JP2001126980A (ja) * 1999-11-01 2001-05-11 Nikon Corp 蓄積エネルギー計算方法、プログラム記憶媒体、近接効果計算方法、マスク又はレチクルパターンの設計方法、及び半導体デバイスの製造方法
JP2003142500A (ja) * 2001-10-30 2003-05-16 Fujitsu Ltd 半導体装置の製造方法
JP4291037B2 (ja) 2003-05-07 2009-07-08 スガツネ工業株式会社 スライドヒンジ
US8539392B2 (en) 2011-02-24 2013-09-17 National Taiwan University Method for compensating proximity effects of particle beam lithography processes

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2143737A1 (de) * 1971-09-01 1973-03-08 Ibm Deutschland Photoaetzverfahren
JPS51147262A (en) * 1975-06-13 1976-12-17 Fujitsu Ltd Electronic beam exposure method
US4099062A (en) * 1976-12-27 1978-07-04 International Business Machines Corporation Electron beam lithography process
DE2852961A1 (de) * 1978-12-07 1980-06-19 Siemens Ag Verfahren zum aufbringen sehr feiner strukturen auf ein substrat
JPS5596942A (en) * 1979-01-19 1980-07-23 Matsushita Electric Ind Co Ltd Method and apparatus for producing minute pattern
DE2927242A1 (de) * 1979-07-05 1981-01-08 Siemens Ag Korpuskel- oder roentgenlithografisches verfahren zur strukturerzeugung
JPS56112729A (en) * 1980-02-08 1981-09-05 Fujitsu Ltd Exposure of electron beam

Also Published As

Publication number Publication date
EP0097903B1 (de) 1989-12-27
US4644170A (en) 1987-02-17
EP0097903A2 (de) 1984-01-11
EP0097903A3 (en) 1985-10-23
JPS594017A (ja) 1984-01-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee