JPS52117559A - Mask formation method - Google Patents
Mask formation methodInfo
- Publication number
- JPS52117559A JPS52117559A JP3483476A JP3483476A JPS52117559A JP S52117559 A JPS52117559 A JP S52117559A JP 3483476 A JP3483476 A JP 3483476A JP 3483476 A JP3483476 A JP 3483476A JP S52117559 A JPS52117559 A JP S52117559A
- Authority
- JP
- Japan
- Prior art keywords
- film
- formation method
- substrate
- mask formation
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3483476A JPS52117559A (en) | 1976-03-30 | 1976-03-30 | Mask formation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3483476A JPS52117559A (en) | 1976-03-30 | 1976-03-30 | Mask formation method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52117559A true JPS52117559A (en) | 1977-10-03 |
Family
ID=12425220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3483476A Pending JPS52117559A (en) | 1976-03-30 | 1976-03-30 | Mask formation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52117559A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014007310A (ja) * | 2012-06-26 | 2014-01-16 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置の製造方法および炭化珪素半導体装置 |
-
1976
- 1976-03-30 JP JP3483476A patent/JPS52117559A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014007310A (ja) * | 2012-06-26 | 2014-01-16 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置の製造方法および炭化珪素半導体装置 |
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