JPS52116173A - Exposure method by light beam - Google Patents

Exposure method by light beam

Info

Publication number
JPS52116173A
JPS52116173A JP3396776A JP3396776A JPS52116173A JP S52116173 A JPS52116173 A JP S52116173A JP 3396776 A JP3396776 A JP 3396776A JP 3396776 A JP3396776 A JP 3396776A JP S52116173 A JPS52116173 A JP S52116173A
Authority
JP
Japan
Prior art keywords
light beam
pattern
exposure method
irradiation
tapering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3396776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5617820B2 (cs
Inventor
Nobuhiko Eguchi
Masaharu Takahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3396776A priority Critical patent/JPS52116173A/ja
Publication of JPS52116173A publication Critical patent/JPS52116173A/ja
Publication of JPS5617820B2 publication Critical patent/JPS5617820B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP3396776A 1976-03-26 1976-03-26 Exposure method by light beam Granted JPS52116173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3396776A JPS52116173A (en) 1976-03-26 1976-03-26 Exposure method by light beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3396776A JPS52116173A (en) 1976-03-26 1976-03-26 Exposure method by light beam

Publications (2)

Publication Number Publication Date
JPS52116173A true JPS52116173A (en) 1977-09-29
JPS5617820B2 JPS5617820B2 (cs) 1981-04-24

Family

ID=12401251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3396776A Granted JPS52116173A (en) 1976-03-26 1976-03-26 Exposure method by light beam

Country Status (1)

Country Link
JP (1) JPS52116173A (cs)

Also Published As

Publication number Publication date
JPS5617820B2 (cs) 1981-04-24

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