JPS52112276A - Liquid-phase epitaxial growth system - Google Patents

Liquid-phase epitaxial growth system

Info

Publication number
JPS52112276A
JPS52112276A JP2887676A JP2887676A JPS52112276A JP S52112276 A JPS52112276 A JP S52112276A JP 2887676 A JP2887676 A JP 2887676A JP 2887676 A JP2887676 A JP 2887676A JP S52112276 A JPS52112276 A JP S52112276A
Authority
JP
Japan
Prior art keywords
liquid
epitaxial growth
phase epitaxial
growth system
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2887676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5516531B2 (enrdf_load_html_response
Inventor
Saburo Yamamoto
Morichika Yano
Yukio Kurata
Kaneki Matsui
Akira Komuro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP2887676A priority Critical patent/JPS52112276A/ja
Publication of JPS52112276A publication Critical patent/JPS52112276A/ja
Publication of JPS5516531B2 publication Critical patent/JPS5516531B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP2887676A 1976-03-16 1976-03-16 Liquid-phase epitaxial growth system Granted JPS52112276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2887676A JPS52112276A (en) 1976-03-16 1976-03-16 Liquid-phase epitaxial growth system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2887676A JPS52112276A (en) 1976-03-16 1976-03-16 Liquid-phase epitaxial growth system

Publications (2)

Publication Number Publication Date
JPS52112276A true JPS52112276A (en) 1977-09-20
JPS5516531B2 JPS5516531B2 (enrdf_load_html_response) 1980-05-02

Family

ID=12260575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2887676A Granted JPS52112276A (en) 1976-03-16 1976-03-16 Liquid-phase epitaxial growth system

Country Status (1)

Country Link
JP (1) JPS52112276A (enrdf_load_html_response)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4866370A (enrdf_load_html_response) * 1971-12-14 1973-09-11
JPS4946871A (enrdf_load_html_response) * 1972-09-09 1974-05-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4866370A (enrdf_load_html_response) * 1971-12-14 1973-09-11
JPS4946871A (enrdf_load_html_response) * 1972-09-09 1974-05-07

Also Published As

Publication number Publication date
JPS5516531B2 (enrdf_load_html_response) 1980-05-02

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