JPS5516531B2 - - Google Patents

Info

Publication number
JPS5516531B2
JPS5516531B2 JP2887676A JP2887676A JPS5516531B2 JP S5516531 B2 JPS5516531 B2 JP S5516531B2 JP 2887676 A JP2887676 A JP 2887676A JP 2887676 A JP2887676 A JP 2887676A JP S5516531 B2 JPS5516531 B2 JP S5516531B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2887676A
Other languages
Japanese (ja)
Other versions
JPS52112276A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2887676A priority Critical patent/JPS52112276A/ja
Publication of JPS52112276A publication Critical patent/JPS52112276A/ja
Publication of JPS5516531B2 publication Critical patent/JPS5516531B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP2887676A 1976-03-16 1976-03-16 Liquid-phase epitaxial growth system Granted JPS52112276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2887676A JPS52112276A (en) 1976-03-16 1976-03-16 Liquid-phase epitaxial growth system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2887676A JPS52112276A (en) 1976-03-16 1976-03-16 Liquid-phase epitaxial growth system

Publications (2)

Publication Number Publication Date
JPS52112276A JPS52112276A (en) 1977-09-20
JPS5516531B2 true JPS5516531B2 (enrdf_load_html_response) 1980-05-02

Family

ID=12260575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2887676A Granted JPS52112276A (en) 1976-03-16 1976-03-16 Liquid-phase epitaxial growth system

Country Status (1)

Country Link
JP (1) JPS52112276A (enrdf_load_html_response)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318151B2 (enrdf_load_html_response) * 1971-12-14 1978-06-13
JPS4946871A (enrdf_load_html_response) * 1972-09-09 1974-05-07

Also Published As

Publication number Publication date
JPS52112276A (en) 1977-09-20

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