JPS52104191U - - Google Patents
Info
- Publication number
- JPS52104191U JPS52104191U JP1976012362U JP1236276U JPS52104191U JP S52104191 U JPS52104191 U JP S52104191U JP 1976012362 U JP1976012362 U JP 1976012362U JP 1236276 U JP1236276 U JP 1236276U JP S52104191 U JPS52104191 U JP S52104191U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/301—Arrangements enabling beams to pass between regions of different pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976012362U JPS5523746Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-02-05 | 1976-02-05 | |
| GB2732/77A GB1516484A (en) | 1976-02-05 | 1977-01-24 | Electron beam machining apparatus |
| US05/762,402 US4080526A (en) | 1976-02-05 | 1977-01-26 | Electron beam machining apparatus of the dynamic seal type |
| NO77770307A NO143867C (no) | 1976-02-05 | 1977-01-31 | Elektronstraale-bearbeidelses-apparat med dynamisk tetning |
| SE7701126A SE410831B (sv) | 1976-02-05 | 1977-02-02 | Anordning for bearbetning medelst elektronstrale |
| FR7702980A FR2340168A1 (fr) | 1976-02-05 | 1977-02-03 | Appareil de soudage par faisceau d'electrons du type a joint dynamique |
| NLAANVRAGE7701166,A NL177638C (nl) | 1976-02-05 | 1977-02-03 | Met een electronenbundel werkende bewerkingsmachine met meebewegende afdichtband. |
| DE2704687A DE2704687C3 (de) | 1976-02-05 | 1977-02-04 | Dynamisch abgedichtete Elektronenstrahlbearbeitungsvorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976012362U JPS5523746Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-02-05 | 1976-02-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52104191U true JPS52104191U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-08-08 |
| JPS5523746Y2 JPS5523746Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-06-06 |
Family
ID=11803153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976012362U Expired JPS5523746Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-02-05 | 1976-02-05 |
Country Status (8)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54113594A (en) * | 1977-05-27 | 1979-09-05 | Steigerwald Strahltech | Sealing device for movable vacuum chamber of charged particle beam machine |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4162391A (en) * | 1977-12-19 | 1979-07-24 | Sciaky Bros., Inc. | Sliding vacuum seal means |
| DE2819993C3 (de) * | 1978-05-08 | 1982-01-28 | Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel | Mundstück zur Ankoppelung einer Elektronenstrahlkanone an Druckformzylinder |
| JPS5844938Y2 (ja) * | 1978-05-17 | 1983-10-12 | 三菱重工業株式会社 | 円筒部材の電子ビ−ム加工装置 |
| FR2481173A1 (fr) * | 1980-04-25 | 1981-10-30 | Petroles Cie Francaise | Chambre de soudage par faisceau d'electrons pour l'assemblage bout a bout de pieces allongees |
| FR2481174A1 (fr) * | 1980-04-25 | 1981-10-30 | Petroles Cie Francaise | Chambre de soudage a vide pour le soudage bout a bout par faisceau d'electrons de pieces allongees et procede d'utilisation d'une telle chambre |
| US4425508A (en) * | 1982-05-07 | 1984-01-10 | Gca Corporation | Electron beam lithographic apparatus |
| FR2571995B1 (fr) * | 1984-10-22 | 1986-12-26 | Soudure Autogene Francaise | Machine pour le soudage externe de tubes bout a bout, par faisceau d'electrons |
| CS267642B1 (en) * | 1987-12-18 | 1990-02-12 | Josef Ing Melkes | Portable rastering electron microscope |
| US5170028A (en) * | 1989-08-28 | 1992-12-08 | Hitachi, Ltd. | Process and apparatus, for electron beam welding of a member partially enclosed in vacuum chamber, and the member formed thereby |
| NL1026547C2 (nl) * | 2004-07-01 | 2006-01-03 | Fei Co | Apparaat voor het evacueren van een sample. |
| US7301157B2 (en) * | 2005-09-28 | 2007-11-27 | Fei Company | Cluster tool for microscopic processing of samples |
| US20070199930A1 (en) * | 2006-02-22 | 2007-08-30 | Mecco Partnership, Llc | Laser marking system |
| WO2007145712A2 (en) * | 2006-06-07 | 2007-12-21 | Fei Company | Slider bearing for use with an apparatus comprising a vacuum chamber |
| CN101461026B (zh) * | 2006-06-07 | 2012-01-18 | Fei公司 | 与包含真空室的装置一起使用的滑动轴承 |
| DE102009039621B4 (de) * | 2009-09-01 | 2012-06-28 | Global Beam Technologies Ag | Teilchenstrahlbearbeitungsvorrichtung wie eine Elektronenstrahlbearbeitungsvorrichtung |
| KR20120126064A (ko) | 2010-01-28 | 2012-11-20 | 배트 홀딩 아게 | 챔버벽의 개구부를 폐쇄하기 위한 장치 |
| US9375804B2 (en) * | 2011-07-27 | 2016-06-28 | GM Global Technology Operations LLC | Low pressure electron beam welding of Li-ion battery connections |
| DE102012202330B4 (de) * | 2012-02-16 | 2017-08-17 | Trumpf Laser Gmbh | Laserbearbeitungsvorrichtung mit einem relativ zu einer Spannpratze beweglichen Laserbearbeitungskopf |
| JP6037741B2 (ja) * | 2012-09-18 | 2016-12-07 | 三菱重工工作機械株式会社 | 移動型真空溶接装置 |
| GB201609995D0 (en) * | 2016-06-08 | 2016-07-20 | Aquasium Technology Ltd | Shaped welding head |
| JP2019532493A (ja) * | 2016-08-22 | 2019-11-07 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 真空チャンバ用のドアシール |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL295180A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1962-07-11 | |||
| US3466487A (en) * | 1967-06-16 | 1969-09-09 | United Aircraft Corp | Device for moving a beam of charged particles |
| US3465119A (en) * | 1967-06-21 | 1969-09-02 | United Aircraft Corp | Multiaxis optical viewing system of a movable electron beam in a vacuum chamber |
| US3588463A (en) * | 1969-09-08 | 1971-06-28 | United Aircraft Corp | Method and apparatus for tracking a seam |
| US3748432A (en) * | 1971-12-27 | 1973-07-24 | Boeing Co | Apparatus for welding corrugated materials by plasma electron beam welding system |
-
1976
- 1976-02-05 JP JP1976012362U patent/JPS5523746Y2/ja not_active Expired
-
1977
- 1977-01-24 GB GB2732/77A patent/GB1516484A/en not_active Expired
- 1977-01-26 US US05/762,402 patent/US4080526A/en not_active Expired - Lifetime
- 1977-01-31 NO NO77770307A patent/NO143867C/no unknown
- 1977-02-02 SE SE7701126A patent/SE410831B/xx unknown
- 1977-02-03 NL NLAANVRAGE7701166,A patent/NL177638C/xx not_active IP Right Cessation
- 1977-02-03 FR FR7702980A patent/FR2340168A1/fr active Granted
- 1977-02-04 DE DE2704687A patent/DE2704687C3/de not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54113594A (en) * | 1977-05-27 | 1979-09-05 | Steigerwald Strahltech | Sealing device for movable vacuum chamber of charged particle beam machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5523746Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-06-06 |
| DE2704687B2 (de) | 1980-06-12 |
| FR2340168B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-05-29 |
| DE2704687C3 (de) | 1981-02-19 |
| DE2704687A1 (de) | 1977-08-11 |
| NO143867C (no) | 1981-04-29 |
| SE7701126L (sv) | 1977-08-06 |
| NL7701166A (nl) | 1977-08-09 |
| SE410831B (sv) | 1979-11-12 |
| US4080526A (en) | 1978-03-21 |
| NL177638C (nl) | 1985-10-16 |
| NO770307L (no) | 1977-08-08 |
| NL177638B (nl) | 1985-05-17 |
| GB1516484A (en) | 1978-07-05 |
| NO143867B (no) | 1981-01-19 |
| FR2340168A1 (fr) | 1977-09-02 |