NO770307L - Elektronstr}le-bearbeidelsesapparat med dynamisk tetning. - Google Patents

Elektronstr}le-bearbeidelsesapparat med dynamisk tetning.

Info

Publication number
NO770307L
NO770307L NO77770307A NO770307A NO770307L NO 770307 L NO770307 L NO 770307L NO 77770307 A NO77770307 A NO 77770307A NO 770307 A NO770307 A NO 770307A NO 770307 L NO770307 L NO 770307L
Authority
NO
Norway
Prior art keywords
dynamic seal
working appliance
electronic size
electronic
size
Prior art date
Application number
NO77770307A
Other languages
English (en)
Other versions
NO143867B (no
NO143867C (no
Inventor
Shiso Kihara
Hiroshi Kono
Masaharu Minami
Masaru Higuchi
Original Assignee
Mitsubishi Heavy Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Ind Ltd filed Critical Mitsubishi Heavy Ind Ltd
Publication of NO770307L publication Critical patent/NO770307L/no
Publication of NO143867B publication Critical patent/NO143867B/no
Publication of NO143867C publication Critical patent/NO143867C/no

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
NO77770307A 1976-02-05 1977-01-31 Elektronstraale-bearbeidelses-apparat med dynamisk tetning NO143867C (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976012362U JPS5523746Y2 (no) 1976-02-05 1976-02-05

Publications (3)

Publication Number Publication Date
NO770307L true NO770307L (no) 1977-08-08
NO143867B NO143867B (no) 1981-01-19
NO143867C NO143867C (no) 1981-04-29

Family

ID=11803153

Family Applications (1)

Application Number Title Priority Date Filing Date
NO77770307A NO143867C (no) 1976-02-05 1977-01-31 Elektronstraale-bearbeidelses-apparat med dynamisk tetning

Country Status (8)

Country Link
US (1) US4080526A (no)
JP (1) JPS5523746Y2 (no)
DE (1) DE2704687C3 (no)
FR (1) FR2340168A1 (no)
GB (1) GB1516484A (no)
NL (1) NL177638C (no)
NO (1) NO143867C (no)
SE (1) SE410831B (no)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1109095A (en) * 1977-05-27 1981-09-15 Peter Anderl Sealing system for a movable vacuum chamber of a charged particle beam machine
US4162391A (en) * 1977-12-19 1979-07-24 Sciaky Bros., Inc. Sliding vacuum seal means
DE2819993C3 (de) * 1978-05-08 1982-01-28 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Mundstück zur Ankoppelung einer Elektronenstrahlkanone an Druckformzylinder
JPS5844938Y2 (ja) * 1978-05-17 1983-10-12 三菱重工業株式会社 円筒部材の電子ビ−ム加工装置
FR2481173A1 (fr) * 1980-04-25 1981-10-30 Petroles Cie Francaise Chambre de soudage par faisceau d'electrons pour l'assemblage bout a bout de pieces allongees
FR2481174A1 (fr) * 1980-04-25 1981-10-30 Petroles Cie Francaise Chambre de soudage a vide pour le soudage bout a bout par faisceau d'electrons de pieces allongees et procede d'utilisation d'une telle chambre
US4425508A (en) * 1982-05-07 1984-01-10 Gca Corporation Electron beam lithographic apparatus
FR2571995B1 (fr) * 1984-10-22 1986-12-26 Soudure Autogene Francaise Machine pour le soudage externe de tubes bout a bout, par faisceau d'electrons
CS267642B1 (en) * 1987-12-18 1990-02-12 Josef Ing Melkes Portable rastering electron microscope
US5170028A (en) * 1989-08-28 1992-12-08 Hitachi, Ltd. Process and apparatus, for electron beam welding of a member partially enclosed in vacuum chamber, and the member formed thereby
NL1026547C2 (nl) * 2004-07-01 2006-01-03 Fei Co Apparaat voor het evacueren van een sample.
US7301157B2 (en) * 2005-09-28 2007-11-27 Fei Company Cluster tool for microscopic processing of samples
US20070199930A1 (en) * 2006-02-22 2007-08-30 Mecco Partnership, Llc Laser marking system
CN101461026B (zh) * 2006-06-07 2012-01-18 Fei公司 与包含真空室的装置一起使用的滑动轴承
WO2007145712A2 (en) * 2006-06-07 2007-12-21 Fei Company Slider bearing for use with an apparatus comprising a vacuum chamber
DE102009039621B4 (de) * 2009-09-01 2012-06-28 Global Beam Technologies Ag Teilchenstrahlbearbeitungsvorrichtung wie eine Elektronenstrahlbearbeitungsvorrichtung
US9383037B2 (en) 2010-01-28 2016-07-05 Vat Holding Ag Device for closing an opening in a chamber wall
US9375804B2 (en) 2011-07-27 2016-06-28 GM Global Technology Operations LLC Low pressure electron beam welding of Li-ion battery connections
DE102012202330B4 (de) * 2012-02-16 2017-08-17 Trumpf Laser Gmbh Laserbearbeitungsvorrichtung mit einem relativ zu einer Spannpratze beweglichen Laserbearbeitungskopf
JP6037741B2 (ja) * 2012-09-18 2016-12-07 三菱重工工作機械株式会社 移動型真空溶接装置
GB201609995D0 (en) 2016-06-08 2016-07-20 Aquasium Technology Ltd Shaped welding head
TW201823613A (zh) * 2016-08-22 2018-07-01 美商應用材料股份有限公司 具有可膨脹密封件之真空腔室

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE634718A (no) * 1962-07-11
US3466487A (en) * 1967-06-16 1969-09-09 United Aircraft Corp Device for moving a beam of charged particles
US3465119A (en) * 1967-06-21 1969-09-02 United Aircraft Corp Multiaxis optical viewing system of a movable electron beam in a vacuum chamber
US3588463A (en) * 1969-09-08 1971-06-28 United Aircraft Corp Method and apparatus for tracking a seam
US3748432A (en) * 1971-12-27 1973-07-24 Boeing Co Apparatus for welding corrugated materials by plasma electron beam welding system

Also Published As

Publication number Publication date
NO143867B (no) 1981-01-19
GB1516484A (en) 1978-07-05
NL7701166A (nl) 1977-08-09
NL177638C (nl) 1985-10-16
NL177638B (nl) 1985-05-17
NO143867C (no) 1981-04-29
SE410831B (sv) 1979-11-12
DE2704687C3 (de) 1981-02-19
DE2704687A1 (de) 1977-08-11
FR2340168B1 (no) 1981-05-29
US4080526A (en) 1978-03-21
JPS5523746Y2 (no) 1980-06-06
JPS52104191U (no) 1977-08-08
FR2340168A1 (fr) 1977-09-02
SE7701126L (sv) 1977-08-06
DE2704687B2 (de) 1980-06-12

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