JPS54113594A - Sealing device for movable vacuum chamber of charged particle beam machine - Google Patents
Sealing device for movable vacuum chamber of charged particle beam machineInfo
- Publication number
- JPS54113594A JPS54113594A JP6286778A JP6286778A JPS54113594A JP S54113594 A JPS54113594 A JP S54113594A JP 6286778 A JP6286778 A JP 6286778A JP 6286778 A JP6286778 A JP 6286778A JP S54113594 A JPS54113594 A JP S54113594A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- sealing device
- charged particle
- particle beam
- beam machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB22620/77A GB1604654A (en) | 1977-05-27 | 1977-05-27 | Sealing system for a vacuum chamber of a charged particle beam machine |
GB4252977 | 1977-10-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54113594A true JPS54113594A (en) | 1979-09-05 |
JPS5841954B2 JPS5841954B2 (en) | 1983-09-16 |
Family
ID=26256029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53062867A Expired JPS5841954B2 (en) | 1977-05-27 | 1978-05-27 | Sealing device for the movable vacuum chamber of charged particle beam machines |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5841954B2 (en) |
CA (1) | CA1109095A (en) |
DE (1) | DE2823321A1 (en) |
FR (1) | FR2392492A1 (en) |
IT (1) | IT1104654B (en) |
SE (1) | SE7806082L (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019521860A (en) * | 2016-06-08 | 2019-08-08 | アクアジウム・テクノロジー・リミテッドAquasium Technology Limited | Forming welding head for electron beam or laser beam welding |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19623577C2 (en) * | 1996-06-13 | 1998-04-30 | Krc Umwelttechnik Gmbh | Seal for rotary tubes |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4998746A (en) * | 1973-01-30 | 1974-09-18 | ||
JPS50119752A (en) * | 1974-03-06 | 1975-09-19 | ||
JPS5114463A (en) * | 1974-07-27 | 1976-02-04 | Toshio Kora | Yokusosuiseigyosochi |
JPS52104191U (en) * | 1976-02-05 | 1977-08-08 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL290719A (en) * | 1962-03-28 | |||
FR1367459A (en) * | 1962-03-28 | 1964-07-24 | United Aircraft Corp | Device for welding using an electron beam without a vacuum chamber |
GB1292338A (en) * | 1968-10-28 | 1972-10-11 | Karl-Heinz Steigwald | Sealing means |
FR2061966A5 (en) * | 1969-10-06 | 1971-06-25 | Peyrot Jean Pierre | |
FR2226888A1 (en) * | 1973-04-17 | 1974-11-15 | Field Automation Sarl | Flexible snap action joint with sliding access chamber - for entry to controlled atmos along sealed joint path |
-
1978
- 1978-05-26 CA CA304,172A patent/CA1109095A/en not_active Expired
- 1978-05-26 SE SE7806082A patent/SE7806082L/en unknown
- 1978-05-26 FR FR7815687A patent/FR2392492A1/en active Granted
- 1978-05-26 IT IT49576/78A patent/IT1104654B/en active
- 1978-05-27 JP JP53062867A patent/JPS5841954B2/en not_active Expired
- 1978-05-29 DE DE19782823321 patent/DE2823321A1/en not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4998746A (en) * | 1973-01-30 | 1974-09-18 | ||
JPS50119752A (en) * | 1974-03-06 | 1975-09-19 | ||
JPS5114463A (en) * | 1974-07-27 | 1976-02-04 | Toshio Kora | Yokusosuiseigyosochi |
JPS52104191U (en) * | 1976-02-05 | 1977-08-08 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019521860A (en) * | 2016-06-08 | 2019-08-08 | アクアジウム・テクノロジー・リミテッドAquasium Technology Limited | Forming welding head for electron beam or laser beam welding |
Also Published As
Publication number | Publication date |
---|---|
SE7806082L (en) | 1978-11-28 |
IT1104654B (en) | 1985-10-21 |
IT7849576A0 (en) | 1978-05-26 |
JPS5841954B2 (en) | 1983-09-16 |
CA1109095A (en) | 1981-09-15 |
FR2392492A1 (en) | 1978-12-22 |
FR2392492B1 (en) | 1983-08-12 |
DE2823321A1 (en) | 1978-12-07 |
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