JPS54113594A - Sealing device for movable vacuum chamber of charged particle beam machine - Google Patents

Sealing device for movable vacuum chamber of charged particle beam machine

Info

Publication number
JPS54113594A
JPS54113594A JP6286778A JP6286778A JPS54113594A JP S54113594 A JPS54113594 A JP S54113594A JP 6286778 A JP6286778 A JP 6286778A JP 6286778 A JP6286778 A JP 6286778A JP S54113594 A JPS54113594 A JP S54113594A
Authority
JP
Japan
Prior art keywords
vacuum chamber
sealing device
charged particle
particle beam
beam machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6286778A
Other languages
Japanese (ja)
Other versions
JPS5841954B2 (en
Inventor
Anderuru Peeteru
Shiefuerusu Uiruherumu
Menhi Kurausupeeteru
Haintsu Shiyutaigeruuar Karuru
Keenitsuhi Deiiteru
Katsuperusuberugeru Eruuin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Steigerwald Strahltecknik GmbH
Original Assignee
Steigerwald Strahltecknik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB22620/77A external-priority patent/GB1604654A/en
Application filed by Steigerwald Strahltecknik GmbH filed Critical Steigerwald Strahltecknik GmbH
Publication of JPS54113594A publication Critical patent/JPS54113594A/en
Publication of JPS5841954B2 publication Critical patent/JPS5841954B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
JP53062867A 1977-05-27 1978-05-27 Sealing device for the movable vacuum chamber of charged particle beam machines Expired JPS5841954B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB22620/77A GB1604654A (en) 1977-05-27 1977-05-27 Sealing system for a vacuum chamber of a charged particle beam machine
GB4252977 1977-10-12

Publications (2)

Publication Number Publication Date
JPS54113594A true JPS54113594A (en) 1979-09-05
JPS5841954B2 JPS5841954B2 (en) 1983-09-16

Family

ID=26256029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53062867A Expired JPS5841954B2 (en) 1977-05-27 1978-05-27 Sealing device for the movable vacuum chamber of charged particle beam machines

Country Status (6)

Country Link
JP (1) JPS5841954B2 (en)
CA (1) CA1109095A (en)
DE (1) DE2823321A1 (en)
FR (1) FR2392492A1 (en)
IT (1) IT1104654B (en)
SE (1) SE7806082L (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019521860A (en) * 2016-06-08 2019-08-08 アクアジウム・テクノロジー・リミテッドＡｑｕａｓｉｕｍ Ｔｅｃｈｎｏｌｏｇｙ Ｌｉｍｉｔｅｄ Forming welding head for electron beam or laser beam welding

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19623577C2 (en) * 1996-06-13 1998-04-30 Krc Umwelttechnik Gmbh Seal for rotary tubes

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4998746A (en) * 1973-01-30 1974-09-18
JPS50119752A (en) * 1974-03-06 1975-09-19
JPS5114463A (en) * 1974-07-27 1976-02-04 Toshio Kora Yokusosuiseigyosochi
JPS52104191U (en) * 1976-02-05 1977-08-08

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL290719A (en) * 1962-03-28
FR1367459A (en) * 1962-03-28 1964-07-24 United Aircraft Corp Device for welding using an electron beam without a vacuum chamber
GB1292338A (en) * 1968-10-28 1972-10-11 Karl-Heinz Steigwald Sealing means
FR2061966A5 (en) * 1969-10-06 1971-06-25 Peyrot Jean Pierre
FR2226888A1 (en) * 1973-04-17 1974-11-15 Field Automation Sarl Flexible snap action joint with sliding access chamber - for entry to controlled atmos along sealed joint path

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4998746A (en) * 1973-01-30 1974-09-18
JPS50119752A (en) * 1974-03-06 1975-09-19
JPS5114463A (en) * 1974-07-27 1976-02-04 Toshio Kora Yokusosuiseigyosochi
JPS52104191U (en) * 1976-02-05 1977-08-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019521860A (en) * 2016-06-08 2019-08-08 アクアジウム・テクノロジー・リミテッドＡｑｕａｓｉｕｍ Ｔｅｃｈｎｏｌｏｇｙ Ｌｉｍｉｔｅｄ Forming welding head for electron beam or laser beam welding

Also Published As

Publication number Publication date
FR2392492B1 (en) 1983-08-12
IT7849576A0 (en) 1978-05-26
JPS5841954B2 (en) 1983-09-16
DE2823321A1 (en) 1978-12-07
SE7806082L (en) 1978-11-28
IT1104654B (en) 1985-10-21
FR2392492A1 (en) 1978-12-22
CA1109095A (en) 1981-09-15

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