JPS53148980A - Method of projecting charged particle beam - Google Patents
Method of projecting charged particle beamInfo
- Publication number
- JPS53148980A JPS53148980A JP6387377A JP6387377A JPS53148980A JP S53148980 A JPS53148980 A JP S53148980A JP 6387377 A JP6387377 A JP 6387377A JP 6387377 A JP6387377 A JP 6387377A JP S53148980 A JPS53148980 A JP S53148980A
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- projecting charged
- projecting
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6387377A JPS53148980A (en) | 1977-05-31 | 1977-05-31 | Method of projecting charged particle beam |
US05/909,217 US4182958A (en) | 1977-05-31 | 1978-05-25 | Method and apparatus for projecting a beam of electrically charged particles |
GB22798/78A GB1605087A (en) | 1977-05-31 | 1978-05-25 | Method for shaping a beam of electrically charged particles |
FR7816064A FR2393418B1 (en) | 1977-05-31 | 1978-05-30 | METHOD AND APPARATUS FOR PROJECTING AN ELECTRICIZED PARTICLE BEAM ON A TARGET |
DE2823829A DE2823829C2 (en) | 1977-05-31 | 1978-05-31 | Method and device for changing the beam cross-section of a beam of electrically charged particles |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6387377A JPS53148980A (en) | 1977-05-31 | 1977-05-31 | Method of projecting charged particle beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53148980A true JPS53148980A (en) | 1978-12-26 |
JPS5424830B2 JPS5424830B2 (en) | 1979-08-23 |
Family
ID=13241842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6387377A Granted JPS53148980A (en) | 1977-05-31 | 1977-05-31 | Method of projecting charged particle beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53148980A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55165633A (en) * | 1979-06-11 | 1980-12-24 | Jeol Ltd | Apparatus for electron-beam exposure |
JPS58106828A (en) * | 1981-12-18 | 1983-06-25 | Fujitsu Ltd | Electron beam exposure method |
JPH01117325A (en) * | 1987-10-30 | 1989-05-10 | Hitachi Ltd | Electron beam lithography device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52143776A (en) * | 1976-05-26 | 1977-11-30 | Toshiba Corp | Electron beam exposure apparatus |
-
1977
- 1977-05-31 JP JP6387377A patent/JPS53148980A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52143776A (en) * | 1976-05-26 | 1977-11-30 | Toshiba Corp | Electron beam exposure apparatus |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55165633A (en) * | 1979-06-11 | 1980-12-24 | Jeol Ltd | Apparatus for electron-beam exposure |
JPS5741811B2 (en) * | 1979-06-11 | 1982-09-04 | ||
JPS58106828A (en) * | 1981-12-18 | 1983-06-25 | Fujitsu Ltd | Electron beam exposure method |
JPH01117325A (en) * | 1987-10-30 | 1989-05-10 | Hitachi Ltd | Electron beam lithography device |
Also Published As
Publication number | Publication date |
---|---|
JPS5424830B2 (en) | 1979-08-23 |
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