JPS53139300A - Charge particle beam workig method - Google Patents

Charge particle beam workig method

Info

Publication number
JPS53139300A
JPS53139300A JP5383877A JP5383877A JPS53139300A JP S53139300 A JPS53139300 A JP S53139300A JP 5383877 A JP5383877 A JP 5383877A JP 5383877 A JP5383877 A JP 5383877A JP S53139300 A JPS53139300 A JP S53139300A
Authority
JP
Japan
Prior art keywords
workig
particle beam
charge particle
charge
workig method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5383877A
Other languages
Japanese (ja)
Inventor
Akiyuki Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Transformer Co Ltd filed Critical Osaka Transformer Co Ltd
Priority to JP5383877A priority Critical patent/JPS53139300A/en
Publication of JPS53139300A publication Critical patent/JPS53139300A/en
Pending legal-status Critical Current

Links

JP5383877A 1977-05-11 1977-05-11 Charge particle beam workig method Pending JPS53139300A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5383877A JPS53139300A (en) 1977-05-11 1977-05-11 Charge particle beam workig method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5383877A JPS53139300A (en) 1977-05-11 1977-05-11 Charge particle beam workig method

Publications (1)

Publication Number Publication Date
JPS53139300A true JPS53139300A (en) 1978-12-05

Family

ID=12953917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5383877A Pending JPS53139300A (en) 1977-05-11 1977-05-11 Charge particle beam workig method

Country Status (1)

Country Link
JP (1) JPS53139300A (en)

Similar Documents

Publication Publication Date Title
DE3065501D1 (en) Deposition method using an energetic particle beam
AU522601B2 (en) Generating charged particles
GB1549451A (en) Charged particle beam apparatus
JPS5498578A (en) Device for projecting particle beam
JPS5494198A (en) Charged particle beam terminating device
JPS52124873A (en) Method of deflecting charged particle beam
JPS5440369A (en) Particle charging device
JPS5522401A (en) Welding method by using charged particle beam and its device
JPS5492389A (en) Particle distribution measuring method
ZA783241B (en) Method
JPS5482778A (en) Particle charger
GB1537943A (en) Charged particle beam deflector
JPS5425596A (en) Method of projecting charged particle beam
JPS5454663A (en) Particle detector
JPS53148980A (en) Method of projecting charged particle beam
JPS5425673A (en) Method of projecting charged particle beam
JPS5425437A (en) Method of charging
JPS52122075A (en) Charged particle beam scanning unit
JPS53139300A (en) Charge particle beam workig method
JPS5451098A (en) Charged particle beam apparatus
JPS5394792A (en) Metallic ion laser
JPS53143100A (en) Charge particle beam working method
JPS53146397A (en) Charge particle beam working method
SU634967A1 (en) Particle mass
JPS5435292A (en) Method