JPS5451098A - Charged particle beam apparatus - Google Patents

Charged particle beam apparatus

Info

Publication number
JPS5451098A
JPS5451098A JP11739977A JP11739977A JPS5451098A JP S5451098 A JPS5451098 A JP S5451098A JP 11739977 A JP11739977 A JP 11739977A JP 11739977 A JP11739977 A JP 11739977A JP S5451098 A JPS5451098 A JP S5451098A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
beam apparatus
charged
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11739977A
Other languages
Japanese (ja)
Other versions
JPS5519717B2 (en
Inventor
Tadao Takizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP11739977A priority Critical patent/JPS5451098A/en
Publication of JPS5451098A publication Critical patent/JPS5451098A/en
Publication of JPS5519717B2 publication Critical patent/JPS5519717B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP11739977A 1977-09-30 1977-09-30 Charged particle beam apparatus Granted JPS5451098A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11739977A JPS5451098A (en) 1977-09-30 1977-09-30 Charged particle beam apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11739977A JPS5451098A (en) 1977-09-30 1977-09-30 Charged particle beam apparatus

Publications (2)

Publication Number Publication Date
JPS5451098A true JPS5451098A (en) 1979-04-21
JPS5519717B2 JPS5519717B2 (en) 1980-05-28

Family

ID=14710678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11739977A Granted JPS5451098A (en) 1977-09-30 1977-09-30 Charged particle beam apparatus

Country Status (1)

Country Link
JP (1) JPS5451098A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5650794A (en) * 1979-09-14 1981-05-08 Petroles Cie Francaise Method of controlling electron beam welding

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5650794A (en) * 1979-09-14 1981-05-08 Petroles Cie Francaise Method of controlling electron beam welding
JPH0255154B2 (en) * 1979-09-14 1990-11-26 Totaru Co Furanseezu Do Petorooru

Also Published As

Publication number Publication date
JPS5519717B2 (en) 1980-05-28

Similar Documents

Publication Publication Date Title
AU522601B2 (en) Generating charged particles
GB1554702A (en) Radiation apparatus
AU3621778A (en) Neutralizing electrically charged airborne particles
GB2011125B (en) Apparatus for electron beam lithograhy
GB1549451A (en) Charged particle beam apparatus
JPS5238879A (en) Particle beam device
EP0088457A3 (en) Charged particle beam apparatus
JPS5498578A (en) Device for projecting particle beam
GB1504976A (en) Charged particle beam apparatus
JPS5494198A (en) Charged particle beam terminating device
GB2005969B (en) Scanning charged particle microprobe
JPS5440369A (en) Particle charging device
JPS5522401A (en) Welding method by using charged particle beam and its device
JPS5492389A (en) Particle distribution measuring method
JPS52139356A (en) Device for deflecting charged particle beam
JPS5482778A (en) Particle charger
JPS5425596A (en) Method of projecting charged particle beam
JPS5454663A (en) Particle detector
JPS526898A (en) Device for focusing high frequency charged particle beam
JPS52122075A (en) Charged particle beam scanning unit
JPS5451098A (en) Charged particle beam apparatus
JPS53148980A (en) Method of projecting charged particle beam
JPS5425673A (en) Method of projecting charged particle beam
JPS5472703A (en) Particle feeding apparatus
JPS5339949A (en) Charged particle beam welding and apparatus therefor