JPS53143100A - Charge particle beam working method - Google Patents

Charge particle beam working method

Info

Publication number
JPS53143100A
JPS53143100A JP5711377A JP5711377A JPS53143100A JP S53143100 A JPS53143100 A JP S53143100A JP 5711377 A JP5711377 A JP 5711377A JP 5711377 A JP5711377 A JP 5711377A JP S53143100 A JPS53143100 A JP S53143100A
Authority
JP
Japan
Prior art keywords
particle beam
working method
charge particle
beam working
charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5711377A
Other languages
Japanese (ja)
Other versions
JPS615836B2 (en
Inventor
Akiyuki Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Transformer Co Ltd filed Critical Osaka Transformer Co Ltd
Priority to JP5711377A priority Critical patent/JPS53143100A/en
Publication of JPS53143100A publication Critical patent/JPS53143100A/en
Publication of JPS615836B2 publication Critical patent/JPS615836B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP5711377A 1977-05-19 1977-05-19 Charge particle beam working method Granted JPS53143100A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5711377A JPS53143100A (en) 1977-05-19 1977-05-19 Charge particle beam working method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5711377A JPS53143100A (en) 1977-05-19 1977-05-19 Charge particle beam working method

Publications (2)

Publication Number Publication Date
JPS53143100A true JPS53143100A (en) 1978-12-13
JPS615836B2 JPS615836B2 (en) 1986-02-21

Family

ID=13046461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5711377A Granted JPS53143100A (en) 1977-05-19 1977-05-19 Charge particle beam working method

Country Status (1)

Country Link
JP (1) JPS53143100A (en)

Also Published As

Publication number Publication date
JPS615836B2 (en) 1986-02-21

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