JPS53141996A - Charge particle beam working device - Google Patents

Charge particle beam working device

Info

Publication number
JPS53141996A
JPS53141996A JP5739177A JP5739177A JPS53141996A JP S53141996 A JPS53141996 A JP S53141996A JP 5739177 A JP5739177 A JP 5739177A JP 5739177 A JP5739177 A JP 5739177A JP S53141996 A JPS53141996 A JP S53141996A
Authority
JP
Japan
Prior art keywords
particle beam
working device
charge particle
beam working
charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5739177A
Other languages
Japanese (ja)
Other versions
JPS615837B2 (en
Inventor
Akiyuki Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Transformer Co Ltd filed Critical Osaka Transformer Co Ltd
Priority to JP5739177A priority Critical patent/JPS53141996A/en
Publication of JPS53141996A publication Critical patent/JPS53141996A/en
Publication of JPS615837B2 publication Critical patent/JPS615837B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP5739177A 1977-05-18 1977-05-18 Charge particle beam working device Granted JPS53141996A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5739177A JPS53141996A (en) 1977-05-18 1977-05-18 Charge particle beam working device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5739177A JPS53141996A (en) 1977-05-18 1977-05-18 Charge particle beam working device

Publications (2)

Publication Number Publication Date
JPS53141996A true JPS53141996A (en) 1978-12-11
JPS615837B2 JPS615837B2 (en) 1986-02-21

Family

ID=13054309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5739177A Granted JPS53141996A (en) 1977-05-18 1977-05-18 Charge particle beam working device

Country Status (1)

Country Link
JP (1) JPS53141996A (en)

Also Published As

Publication number Publication date
JPS615837B2 (en) 1986-02-21

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