JPS53139299A - Charge particle beam working method and device - Google Patents

Charge particle beam working method and device

Info

Publication number
JPS53139299A
JPS53139299A JP5383777A JP5383777A JPS53139299A JP S53139299 A JPS53139299 A JP S53139299A JP 5383777 A JP5383777 A JP 5383777A JP 5383777 A JP5383777 A JP 5383777A JP S53139299 A JPS53139299 A JP S53139299A
Authority
JP
Japan
Prior art keywords
particle beam
working method
charge particle
beam working
charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5383777A
Other languages
Japanese (ja)
Other versions
JPS615835B2 (en
Inventor
Akiyuki Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Transformer Co Ltd filed Critical Osaka Transformer Co Ltd
Priority to JP5383777A priority Critical patent/JPS53139299A/en
Publication of JPS53139299A publication Critical patent/JPS53139299A/en
Publication of JPS615835B2 publication Critical patent/JPS615835B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP5383777A 1977-05-11 1977-05-11 Charge particle beam working method and device Granted JPS53139299A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5383777A JPS53139299A (en) 1977-05-11 1977-05-11 Charge particle beam working method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5383777A JPS53139299A (en) 1977-05-11 1977-05-11 Charge particle beam working method and device

Publications (2)

Publication Number Publication Date
JPS53139299A true JPS53139299A (en) 1978-12-05
JPS615835B2 JPS615835B2 (en) 1986-02-21

Family

ID=12953890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5383777A Granted JPS53139299A (en) 1977-05-11 1977-05-11 Charge particle beam working method and device

Country Status (1)

Country Link
JP (1) JPS53139299A (en)

Also Published As

Publication number Publication date
JPS615835B2 (en) 1986-02-21

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