JPS5482962A - Charged particle beam focusing and deflecting device - Google Patents

Charged particle beam focusing and deflecting device

Info

Publication number
JPS5482962A
JPS5482962A JP15114477A JP15114477A JPS5482962A JP S5482962 A JPS5482962 A JP S5482962A JP 15114477 A JP15114477 A JP 15114477A JP 15114477 A JP15114477 A JP 15114477A JP S5482962 A JPS5482962 A JP S5482962A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
deflecting device
beam focusing
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15114477A
Other languages
Japanese (ja)
Other versions
JPS5853466B2 (en
Inventor
Hidekazu Gotou
Takashi Souma
Masanori Idesawa
Tateaki Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP15114477A priority Critical patent/JPS5853466B2/en
Publication of JPS5482962A publication Critical patent/JPS5482962A/en
Publication of JPS5853466B2 publication Critical patent/JPS5853466B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP15114477A 1977-12-15 1977-12-15 Charged particle beam focusing/deflecting device Expired JPS5853466B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15114477A JPS5853466B2 (en) 1977-12-15 1977-12-15 Charged particle beam focusing/deflecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15114477A JPS5853466B2 (en) 1977-12-15 1977-12-15 Charged particle beam focusing/deflecting device

Publications (2)

Publication Number Publication Date
JPS5482962A true JPS5482962A (en) 1979-07-02
JPS5853466B2 JPS5853466B2 (en) 1983-11-29

Family

ID=15512322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15114477A Expired JPS5853466B2 (en) 1977-12-15 1977-12-15 Charged particle beam focusing/deflecting device

Country Status (1)

Country Link
JP (1) JPS5853466B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131331A (en) * 1984-11-28 1986-06-19 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ Electron beam apparatus
JP2007528106A (en) * 2004-03-19 2007-10-04 イツェーテー インテグレイテッド サーキット テスティング ゲゼルシャフト フュール ハルブライタープリュッフテヒニク ミット ベシュレンクテル ハフツング High current density particle beam system
JP2008153131A (en) * 2006-12-19 2008-07-03 Jeol Ltd Charged particle beam apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131331A (en) * 1984-11-28 1986-06-19 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ Electron beam apparatus
JP2007528106A (en) * 2004-03-19 2007-10-04 イツェーテー インテグレイテッド サーキット テスティング ゲゼルシャフト フュール ハルブライタープリュッフテヒニク ミット ベシュレンクテル ハフツング High current density particle beam system
JP2008153131A (en) * 2006-12-19 2008-07-03 Jeol Ltd Charged particle beam apparatus

Also Published As

Publication number Publication date
JPS5853466B2 (en) 1983-11-29

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